MKS GMW-25, Руководство по эксплуатации

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OPERATION MANUAL
Manual Order Number: 1050-001 Copyright © 1996 MKS Instruments, Inc. All rights reserved.
Revision Level: B 10/07/04 MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
GMW-25
RF Plasma Generator
HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS
UNIT. All operating personnel should use extreme caution in handling
these voltages and be thoroughly familiar with this manual.
CFC's
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE
MAINTENANCE OF THIS PRODUCT.
In recognition of our responsibility to protect
the environment, this product has been manufactured without the use of CFC's. The
no-clean flux now used in all soldering operations may leave a small inert residue that
will not affect the performance of the product. The use of CFC's for cleaning or
maintenance may result in partial liquification of the no-clean flux residue, which will
damage the unit and void the warranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO-9001:2000-Quality-
System-compliant facility.
Notice
The material contained in this manual is subject to change without notice. No part of this manual may be
reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying or
electronic transmission or other means of reproduction or distribution without prior written consent of MKS,
ENI Products. The drawings, specifications and other technical information contained in this manual are the
property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as
the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.