Zeiss GeminiSEM Series, Instruction Manual

Page: 91 / 164

ZEISS 5 Commissioning and First Operating Steps | 5.7 Finding Appropriate Detector Settings
Column Mode Description
Low Mag Only available for GeminiSEM 560.
The image distortions in Low mag mode are very small in
comparison to Overview mode.
This enables precise measurement at low magnifications.
The field of view in Low Mag mode is much smaller than in
Overview mode at long working distances.
Procedure 1. In the GeminiSEM Control panel, select the Control tab.
2. In the Column section, select between:
Normal , Overview , and Low Mag
INFO: Low Mag is only available for GeminiSEM 560.
INFO: If magnification is displayed with a large error in overview mode, check stage height
calibration and specimen height calibration. Expected magnification error is up to about
10 % in overview mode.
5.7 Finding Appropriate Detector Settings
5.7.1 Selecting a Detector
You need to select an appropriate detector depending on the application and the pressure mode.
In addition to the standard SE detector, several optional detectors are available.
For information on special set-up procedures for the detectors, refer to:
§ Setting up the InLens SE Detector [
}
92]
§
Setting up the SE Detector [
}
92]
§
Setting up the VPSE Detector [
}
93]
§
Setting up the C2D Detector [
}
94]
§
Setting up the AsB Detector [
}
95]
§ Setting up the AsB4 Detector [
}
96]
§
Setting up the aBSD/aBSD-LH/VP-BSD Detector [
}
98]
§
Setting up the YAG BSD Detector [
}
99]
§
Setting up the EsB Detector [
}
100]
§
Setting up the SCD Detector [
}
101]
§ Setting up the aSTEM Detector [
}
101]
§
Setting up the CL Detector [
}
103]
Procedure
1. Select the Imaging tab of the GeminiSEM Control panel.
2. Select the detector from the
Signal A drop-
down list.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 91