ZEISS
5 Commissioning and First Operating Steps | 5.7 Finding Appropriate Detector Settings
7. Click
C2D Auto Level
.
à
The brightness offset is cancelled out and the image is readjusted to a centered his-
togram at a brightness value of 50 %.
8. Adjust the contrast of the image.
9. If your image is still too noisy, increase
C2D Bias
or increase
C2D Gain
.
10. Adjust the EHT and working distance (WD) according to the suggestions in the table in or-
der to optimize the image.
5.7.6 Setting up the AsB Detector
The AsB detector is optionally available.
The AsB detector enables four outputs that can be used either for compositional imaging or for
topographical imaging.
Fig. 45: The crystalline structure of a silicon device
The following settings are recommended for the AsB detector:
Detector Settings
1.5 kV – 30 kV
3–10 mm
§
Use compositional mode for obtaining an
image that is high in atomic number con-
trast.
§
Use topography mode for showing sur-
face details.
§
Use individual settings for channeling
contrast.
Procedure
1. In the GeminiSEM Control panel, select the Imaging tab.
2. From the
Signal A
drop-down list, select AsB.
3. To open the
Panel Configuration Bar
, from the
Menu Bar
, select
Tools > Goto Panel
.
à
The
Panel Configuration Bar
is displayed. It contains an alphabetical list of functions.
4. Double-click
BSD Control
.
à
The
BSD Control
dialog is displayed.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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