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9 Technical Data and Conformity | 9.3 Performance Data and Specifications | GeminiSEM 460

ZEISS

Parameter

Description

Modified instrument resolution because of the 2 mm additional
height of the AsB detector is indicated in the resolution values. The
WD indication is automatically corrected, i.e. the displayed WD is the
real distance between the specimen surface and the AsB detector bot-
tom side. Enables in-situ 3D surface reconstruction and quantitative
3D metrology.

AsB4 detector (optional):

Four-quadrant solid state BSD diode (each segment 10 mm²) inte-
grated in the Gemini objective lens for the detection of angular selec-
tive backscattered (AsB) electrons. The detector has the same func-
tionality as the AsB detector with an additional four channel amplifier
for parallel detection of the four segment signals. Enables in-situ 3D
surface reconstruction and quantitative 3D metrology.

aSTEM detector (optional):

Pneumatically retractable multi-mode annular Scanning Transmission
Electron Microscopy (aSTEM) detector, with 12x specimen holder; en-
ables bright field (BF), dark field (DF), oriented dark field (ODF), and
high angle annular dark field (HAADF) transmission imaging

C2D detector (optional):

Cascade Current Detector for detecting SE signal under variable pres-
sure with high efficiency.

Detector with floating amplifier electronics, for enhanced imaging in
Variable Pressure mode up to 500 Pa. Delivers detail at low kV for
specimens that demand higher pressures, e.g. polymers, bio speci-
mens, powders, and fibers. Enhanced signal-to-noise ration versus
VPSE detector.

CL detector (optional):

Cathodoluminiscence (CL) chamber detector

SCD detector (optional):

The specimen current detector (SCD) detects the current absorbed by
the specimen.

SE detector:

Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V

VPSE detector (optional):

Light detector for detecting SE signal under variable pressure (VP)
with high speed.

YAG detector (optional):

Manual retractable, high speed 1 sector scintillator based BSE detec-
tor.

Chamber camera

Color CCD camera

with white-light illumination and IR illumination.

Specimen current
monitor

6 range auto ranging for precise current measurement in the range of
1 pA to 10 μA

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Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

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Summary of Contents for GeminiSEM Series

Page 1: ...Instruction Manual ZEISS GeminiSEM series Field Emission Scanning Electron Microscope ...

Page 2: ...pies for archiving purposes shall remain unaffected thereby Any viola tions may be prosecuted as copyright infringements The use of general descriptive names registered names trademarks etc in this document does not imply that such names are exempt from the relevant intellectual property laws and regulations and therefore free for general use This shall also apply if this is not specifically refer...

Page 3: ...2 3 9 Suffocation Hazards 16 2 4 Warning Labels and Lights 17 2 4 1 Warning Labels 17 2 5 Safety Devices and Interlocks 20 2 5 1 Protective Cover Panels 20 2 5 2 Main Switch 21 2 5 3 Circuit Breaker 22 2 5 4 Emergency Off EMO Option External 22 2 5 5 Emergency Off EMO Option Internal 23 2 5 6 Locking Devices 24 2 5 7 Lockout Tagout Equipment 25 3 Product and Functional Description 26 3 1 System Ov...

Page 4: ...figurations and Beam Modes 89 5 6 1 Determining the Installed Aperture Configuration Gemini 1 Column and Gemini 3 Column 89 5 6 2 Determining the Installed Aperture Configuration Gemini 2 Column 89 5 6 3 Selecting the Aperture 90 5 6 4 Selecting the Column Mode 90 5 7 Finding Appropriate Detector Settings 91 5 7 1 Selecting a Detector 91 5 7 2 Setting up the InLens SE Detector 92 5 7 3 Setting up ...

Page 5: ...ure 122 7 3 Column 122 7 3 1 Baking out the Gun Head 122 7 3 2 Calibrating the Probe Current 123 7 3 3 Calibrating the Stigmator 124 7 4 Power Circuit 124 7 4 1 Checking the Position of the Circuit Breakers 124 7 5 Detectors 125 7 5 1 Lubricating the Rod 125 7 6 Apertures 126 7 6 1 Cleaning the Beamsleeve Apertures 126 7 7 PC 127 7 7 1 Cleaning up the PC 127 8 Decommissioning and Disposal 128 8 1 ...

Page 6: ... Table of Contents ZEISS 10 Parts and Tools 155 10 1 Tools and Accessories 155 Glossary 157 Index 161 6 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 7: ...tains information about starting the microscope and the software obtaining a first image adjusting important parameters and power ing down the microscope also in emergency Care and Mainte nance Informs you about preventive maintenance work and intervals and the change of consumables Troubleshooting Describes common issues and how to resolve them Decommissioning and Disposal Summarizes notes on shu...

Page 8: ...e Safety chapter are to be considered but also the safety instructions and warnings in other chapters Failure to comply with these instructions and warnings can result in both personal injury and property damage and involve the loss of any claims for damages The following symbols and warnings indicating dangerous situations and hazards are used in this document DANGER Type and source of danger DAN...

Page 9: ...ty data sheets must be complied with Software For more detailed information on how to use Smart SEM please refer to its Online Help Software and firmware updates can be found at https www zeiss com microscopy int downloads html or ask your ZEISS Sales Service Partner System and 3rd Party Components Accessories The Microscope System can be configured in many ways Information about the individual co...

Page 10: ...ed by means of a focused electron beam that is scanned across the specimen This application allows for the analysis of surface structures and near surface structures of ap propriate specimens Analytics Elemental analysis with optional EDS spectroscopy at the focused electron beam position Crystal structure and orientation with optional EBSD detectors In combination with a gas injection system opti...

Page 11: ...ssociated docu ments and particularly all safety regulations and instructions and applies the same the local and national safety and accident prevention regulations must be observed as well as the applicable laws and regulations in your country this Instruction Manual is always available with together with the Microscope System the Microscope System is always in perfect condition the Microscope Sy...

Page 12: ...st performance of the microscope it is essential to perform preventive mainte nance on a regular basis Moreover it is recommended that you conclude a service contract with your local ZEISS service representative or organization 2 2 4 Safe Handling of Spare Parts Using spare parts that are not provided by ZEISS can be hazardous or can lead to property dam age Only genuine parts supplied by ZEISS ar...

Page 13: ...4 Read and follow the instructions in the material safety data sheet of the chemical The ma terial safety data sheet can be obtained from the supplier of the chemicals WARNING Reaction products Dangerous reaction products can be present in the specimen chamber during or after opera tion 4 Ensure that there is an appropriate exhaust gas line to remove the waste gas of the pre vacuum pump and to tra...

Page 14: ...ing WARNING High leakage current High leakage currents are present in the microscope Contact may cause burn or electrical shock 4 Ensure proper grounding For more information refer to the Installation Requirements document 4 Do not operate the microscope without the separate ground connection 2 3 5 High Pressure Hazards WARNING High pressure in gas cylinders Gas cylinders containing for example ni...

Page 15: ...chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers CAUTION Closing the chamber door Fingers can be pinched when closing the chamber door 4 Use the door handle to close the chamber door 4 Ensure not to get your fingers caught in the chamber door gap NOTICE Short working distance When opening the chamber do...

Page 16: ... of the microscope has to comply with the local regulations of the coun try where the microscope is operated Contact Radiation Protection For questions regarding radiation protection contact the ZEISS Radiation Safety Officer Carl Zeiss AG 73447 Oberkochen Germany phone 49 0 7364 20 0 2 3 9 Suffocation Hazards WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent th...

Page 17: ... are to be kept in clean and easily legible condition Damaged or illegible warning labels must be replaced immediately Always observe all warning labels on the complete Microscope System 2 4 1 Warning Labels Appropriate safety labels on the microscope warn operators of hazards Each safety label is af fixed close to the point where a particular hazard exists Several labels also provide legal inform...

Page 18: ...ctron microscope does not The local dose rate at a distance of 0 1 m from the exceed 1 µS h 4 5 6 7 8 9 The safety labels always need to be attached to the correct spots at the microscope If a safety la bel is lost or unreadable it needs to be reordered via the following reorder numbers Position and Figure of the Safety La bel Description 1 At the front of the chamber door Risk of injury WARNING 3...

Page 19: ...Ensure that the area around the electron micro scope is sufficiently ventilated Reorder no 347800 0033 000 08en 7 At the rear of the plinth High leakage current CAUTION 347800 0033 000 07en Ensure proper grounding Do not operate the electron microscope without a separate ground connection High leakage current Ensure proper grounding Do not operate the electron microscope without a separate ground ...

Page 20: ...on At the rear of the microscope Type plate Order no 349599 9100 010 GeminiSEM 360 Order no 349599 9100 020 GeminiSEM 460 Order no 349599 9100 030 GeminiSEM 560 2 5 Safety Devices and Interlocks In order to prevent injuries and or property damage the Microscope System is equipped with sev eral safety devices and interlocks Defects and other damaged safety devices may cause injuries and property da...

Page 21: ... Operation of the microscope is only allowed with attached protective cover panels 2 5 2 Main Switch The Main Switch cuts off both phases of the mains power from the microscope The Main Switch guarantees an ampere interrupting capacity AIC of at least 1 500 A rms The Main Switch is located at the rear side of the plinth Fig 2 Main Switch Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500...

Page 22: ...er The circuit breaker does not completely isolate the plinth from the mains power This can only be done using the Main Disconnect Device 2 5 4 Emergency Off EMO Option External The Emergency Off Circuit with the Main Switch is essential for compliance with the SEMI stan dard The Emergency Off Circuit is mounted at the wall near the mains power supply and connects the mains power supply to the mic...

Page 23: ...s connected to the AC Unit The EMO button must always be readily accessible and operable Up to two EMO buttons may be connected Fig 5 EMO button S2 Button The green S2 Start button is attached below the MAIN switch on the EMO box mounted on the wall The S2 Start button is required to confirm the setting of the MAIN switch The Main switch cuts off all devices connected to the EMO box from the main ...

Page 24: ...vice The vacuum locking device ensures that gun vacuum and system vacuum are better than the re quired thresholds 2 5 6 3 Interlock System of Optional Airlock The interlock function ensures that the gate valve can only be operated if the chamber door and the airlock door are properly closed Fig 7 Airlock Error LED Additional blocking functions ensure that the specimen can only be transferred if th...

Page 25: ... or inspecting an energy isolating device is not be exposed to serious risks must close off the connections to the corresponding media when needed must be lockable in their off position in order to prevent accidental re activation The customer is responsible for having a working knowledge of the LOTO specification purchasing distributing and installing appropriate LOTO equipment auditing and enfor...

Page 26: ...efer to manuals of accessories if applicable Especially the chapters Installation and Commissioning and First Operating Steps are important 3 1 System Overview Main Components 4 7 5 6 1 2 3 Fig 8 Main components of the workstation 1 Electron optical Gemini column Refer to Electron Optical Column Gem ini 1 34 Electron Optical Column Gemini 2 36 or Electron Optical Column Gemini 3 38 2 Specimen cham...

Page 27: ...n and probing 8 BSD detector for high efficiency and an gle selective material characterization Detection of up to 4 channels in parallel possible Refer to aBSD LH Detector 49 and aBSD Detector 52 9 Airlock solution 80 mm or 200 mm wide for fast and efficient specimen transfer and fast pumping times Refer to the respective instruction man ual 80 mm Airlock or 200 mm Airlock 10 EBSD for crystallogr...

Page 28: ... to be evacuated The vacuum is essential to operate the gun and to prevent collisions of electrons with gas molecules 2 3 4 1 5 7 6 8 10 9 Fig 10 Schematics of the vacuum system of a microscope with Gemini 1 and Gemini 3 columns 1 2 3 4 5 8 9 10 6 7 Fig 11 Schematics of the vacuum system of a microscope with Gemini 2 column 28 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 29: ...lows into the specimen chamber via the vent valve 9 As soon as the pressure equilibrium is obtained the chamber door can be opened to change the specimen Vent is only possible when high voltage is off Evacuating In order to continue operation the Pump command makes the pre vacuum pump and the turbo pump evacuate the specimen chamber As soon as the vacuum in the specimen chamber is ready for operat...

Page 30: ... the connection between pre vacuum pump and turbo pump The turbo isolation valve TIV 8 is open The vacuum in the specimen chamber is measured by a Penning gauge 13 The detected vac uum values are displayed as System vacuum in the SmartSEM user interface As long as the de tected pressure in the specimen chamber is not ready for operation the column chamber valve 4 is closed in order to separate the...

Page 31: ...0 µm beamsleeve aperture or between 5 and 40 Pa 800 µm beamsleeve aperture XVP mode optional is an enhanced VP mode with an inserted beamsleeve aperture below the objective lens allowing imaging with the VPSE or C2D detectors and highest chamber pressures of up to 500 Pa In XVP mode the partial pressure in the specimen chamber is between 5 and 500 Pa 350 µm beamsleeve aperture or between 5 and 150...

Page 32: ...alve closes the stage is lowered by 20 mm to give space for the beam sleeve aperture The beamsleeve is automatically inserted After the TIV closes and RBV and GFV open the system is doing a leak test if the beamsleeve aperture is vacuum tight fitted to the ob jective lens If the leak test is not successful the system will go back to High Vacuum mode and a screen message is displayed If the leak te...

Page 33: ...is means the BGPL is the distance that the primary beam has to travel through the low vacuum part of the system Keeping the distance small means that scattering of the primary electrons on VP gas mol ecules is kept small resulting in good resolution and signal to noise ratio The BGPL should be not lower than 1 mm because charge compensation is incomplete in this case You will have best results whe...

Page 34: ...oss the specimen surface in what is usually referred to as a raster scan 9 Specimen USup Suppressor voltage UExt Extractor voltage UEHT Acceleration voltage UB Liner tube voltage Gun A Schottky field emitter serves as gun 1 The filament is heated by applying the filament cur rent Electrons are emitted from the heated filament while an electrical field called extractor volt age UExt is applied To s...

Page 35: ...e objective lens in order to guarantee op timum resolution at each probe current and EHT setting Together with the multihole aperture the condenser allows to regulate the probe current Stigmator The stigmator is located inside the condenser and compensates for astigmatism so that the elec tron beam becomes rotationally symmetrical Deflection System The electron beam is focused by the objective len...

Page 36: ... a raster scan 11 Specimen USup Suppressor voltage UExt Extractor voltage UEHT Acceleration voltage UB Liner tube voltage Gun A Schottky field emitter serves as gun 1 The filament is heated by applying the filament cur rent Electrons are emitted from the heated filament while an electrical field called extractor volt age UExt is applied To suppress unwanted thermionic emission from the shank of th...

Page 37: ...r 4 is used to continuously adjust the probe current The lower condenser 6 is used for aperture matching of the objective lens in order to guarantee optimum resolution at each probe current and EHT setting Stigmator The stigmator is located inside the condenser and compensates for astigmatism so that the elec tron beam becomes rotationally symmetrical Deflection System The electron beam is focused...

Page 38: ... beam across the specimen surface in what is usually referred to as a raster scan 9 Specimen USup Suppressor voltage UExt Extractor voltage UEHT Acceleration voltage UB Liner tube voltage Gun A Schottky field emitter serves as gun 1 The filament is heated by applying the filament cur rent Electrons are emitted from the heated filament while an electrical field called extractor volt age UExt is app...

Page 39: ...becomes rotationally symmetrical Deflection System The electron beam is focused by the objective lens 7 onto the specimen 9 while being de flected in a point by point scan over the specimen surface by the scanning coils 8 The Nano Twin lens in the Gemini 3 column has a double deflection system which offers different scan modes to offer navigation modes Overview Low Mag Mode and third order optimiz...

Page 40: ...ondary electrons These are known as SE2 type electrons Detectors that collect SE2 type electrons are especially suitable where the working distance is large Surface detail as the effect of lateral illumination emphasizes the topography of the specimen Backscattered Electrons Backscattered electrons BSEs emerge from below the surface of the specimen up to an order of µm The number of electrons emit...

Page 41: ...g with two concentric rings Compositional con trast HV VP aBSD Detector 52 BSE Angular resolved BSE imaging with three concentric rings Compositional con trast HV VP VP BSD Detector 51 BSE Angular resolved BSE imaging with two concentric rings Compositional con trast Nano VP XVP YAG BSD Detector 55 BSE Compositional con trast Channeling contrast HV VP SCD Detector 56 Absorbed primary electrons Qua...

Page 42: ...d up to an ac celeration voltage of 20 kV by an additional beam booster voltage of 8 kV at the liner tube To ensure that the electrons reach the specimen surface with the energy set as acceleration voltage an opposing electrostatic field of the same magnitude as the beam booster voltage 8 kV is gen erated at the end of the objective lens by the electrostatic lens This electrostatic field acts as a...

Page 43: ...ultiplier 3 Light guide 4 Scintillator 5 Collector grid 6 Specimen Function Electrons moving to the detector are attracted repelled by the collector grid and directed to the scintillator The electrons gain energy from the scintillator and thus are able to interact with a phosphor layer which generates photons light The light travels up a light pipe to a photomulti plier The photomultiplier multipl...

Page 44: ...particular attention to the distance between the objective lens and the top of the specimen This applies to vertical movements but also to horizontal movements because a thick specimen may collide with the objective lens from the side Depending on the selected detector the chamber CCD camera is capable of acquiring black and white images or colored images The performance of the diode detectors is ...

Page 45: ...M software Axis Description Movement X X axis Movement towards or away from the cham ber door horizontal movement in the image Y Y axis Movement Z Height Vertical movement movement towards or away from the focal plane of the image R Rotation Stage rotation parallel to the X Y plane T Tilt Stage tilt about an axis parallel to the X axis 3 2 9 Dual Joystick Purpose The dual joystick is used for stag...

Page 46: ...ressure conditions The SE detector cannot be used under variable pressure conditions The high potential at the scin tillator would cause an electrical breakdown with a lightning flash that runs from the scintillator to the outer body Fig 23 C2D image of a moth Function On the surface of the specimen secondary electrons are created The secondary electrons acceler ate towards the C2D detector due to...

Page 47: ...ctor 1 Preamplifier 2 Photomultiplier 3 Objective lens 4 Light guide with collector electrode 5 Specimen Function The collector electrode mounted on the light guide 4 is held on a positive potential forming a collecting field for SEs Thus SEs move towards the detector In VP mode gas molecules are present in the specimen chamber The accelerated SEs excite gas molecules which emit a photon when they...

Page 48: ...via EsB detector right 1 EsB detector 2 Filtering grid 3 InLens SE detector Function A small amount of SEs pass through the hole of the InLens SE detector 3 and would be ob served by the EsB detector 1 To prevent detection of these SEs a filtering grid 2 is in stalled in front of the EsB detector By switching on the filtering grid voltage the SEs are rejected and only BSEs are detected Below a lan...

Page 49: ... Motorized specimen stage Risk of damaging the detector when operating the motorized specimen stage 4 Retract the detector head completely after you have finished the work with the detector Info Risk of malfunction The diode segments are sensitive to the light that is used for illumination in TV mode infrared and white When you use a diode detector always make sure that the TV illumination is swit...

Page 50: ...electrons are lost in the central hole and cannot be detected A solution for that is the aBSD detector Function On the surface of the specimen some of the primary electrons are backscattered The backscat tered electrons then move towards the silicon segments of the BSD detector If the energy of the backscattered electrons is high enough then the electrons pass through the very thin dead layer of t...

Page 51: ...put channel The VP BSD is especially designed for use in NanoVP and XVP mode If it shall be used in HV mode it is recommended to remove the beamsleeve aperture Then the field of view is not limited by the beamsleeve aperture and the working distance is not also not limited by the beamsleeve aperture but only by the diode itself NOTICE Motorized specimen stage Risk of damaging the detector when ope...

Page 52: ... generation Electrons that have a lower energy e g secondary electrons are not detected by the BSD detector The emission of backscattered electrons from a specimen is related to the atomic number of the involved material Elements with high atomic numbers generate more backscattered electrons i e the backscatter coefficient is higher When imaging regions that contain elements with higher atomic num...

Page 53: ... BSD detector has a relatively large central hole and therefore has the advantage that it does not limit the field of view of the SEM and does not influence the electron optical properties of the objective lens A disadvantage is that especially at low kV a lot of backscattered electrons are lost in the central hole and cannot be detected A solution for that is the aBSD detector Function On the sur...

Page 54: ...ial contrast top left The middle segment S2 shows combined material contrast and topography top right The outer segment S3 S6 shows mainly topography bottom left The final image shows the combined signal of all segments bottom right At small magnifications the field of view is limited by the hole inside the aBSD detector Fig 30 Central hole of the aBSD detector 54 Instruction Manual ZEISS GeminiSE...

Page 55: ...ul when you tilt the specimen Depending on which port the aBSD aBSD LH detector is mounted the stage could hit the supporting arm of the detector far away from the sample This is especially true if the de tector is mounted right hand side of the chamber 3 3 1 7 YAG BSD Detector Purpose The YAG BSD detector is a scintillation type detector for backscattered electrons The YAG BSD detector has a high...

Page 56: ...tector Purpose The specimen current detector SCD detects the current absorbed in the specimen Function A highly sensitive amplifier is connected to the sample measuring the sum of incoming PEs and outgoing SEs and BSEs for each image pixel Fig 33 Silicon chip 56 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 57: ...tegrated in the pole piece it is not compatible with the beamsleeve used in NanoVP XVP mode 1 2 3 4 Fig 34 Schematics of the AsB detector 1 InLens SE detector 2 Objective lens 3 AsB detector 4 Specimen Function High angle BSEs carrying an energy close to the landing energy of the primary beam are pro jected into the Gemini column as well If the angle is too low the BSEs will not enter the column b...

Page 58: ...f If the CCD Mode is set to Auto Detect then the TV illumination is automatically switched off when a diode detector is used Function The aSTEM detector is a pneumatically retractable multi mode detector with a 12 stub specimen holder for bright field and dark field detection The diodes of the aSTEM detector collect transmitted electrons below the ultrathin specimen A special arrangement of the di...

Page 59: ...signal Off The signal is not used NOTICE Motorized specimen stage Risk of damaging the detector when operating the motorized specimen stage 4 Retract the detector head completely after you have finished the work with the detector 3 3 1 11 CL Detector Purpose The Cathodoluminescence CL detector is an inclined detector that allows efficient visible or ultra violet light collection The CL detector is...

Page 60: ...gnal for imaging The CL detector is fully integrated into the automatic brightness and contrast control of the micro scope and can be used simultaneously with any of the detectors without degrading their perfor mance The detector can be used during energy dispersive X ray spectrometer EDS measurements and wavelength dispersive spectrometer WDS measurements at any valid magnification Fig 38 CL imag...

Page 61: ...urrently selected detector 6 Magnification Reduced Magnification Adjusts the magnification of the system Reduced Changes the scan field to a reduced area The size of the area is determined by the current sub scan area settings 7 Wobble Sweeps the acceleration voltage If the aperture is slightly misaligned a shift in X and or Y direction can be observed 8 Freeze Stops the scan and grabs one complet...

Page 62: ...dicates the main elements of the SmartSEM user interface 1 3 2 4 10 6 9 7 11 12 8 5 Fig 40 Main sections in the SmartSEM user interface 1 Title Bar Displays the name of the user interface and the logged on user 2 Menu Bar Enables you to access to SmartSEM features via sub menus 3 AVI Toolbar Contains the controls to set up record and playback video sequences of scanned images 4 Toolbar Provides qu...

Page 63: ...to choose the panels to be placed in the Docking Panel 11 Docking Panel Enables you to arrange frequently used SmartSEM panels for convenient access 12 Mini Bar Provides quick access to recently used dialogs and to the recipe management 3 4 1 2 Graphical Control Elements The following graphical control elements are used in the SmartSEM GUI Screenshot Control Element Function Tab Provides a group o...

Page 64: ...s e g in the status window or annotation parameter selection SmartSEM distinguishes different user access levels Depending on the user access level different parameters are accessible User profiles are defined by the administrator Access Menu Bar Tools Administrator User Access Level Description Novice Only the items assigned to the novice category are accessible These include most frequently used...

Page 65: ...imen chamber 3 4 1 4 SmartSEM Program Suite The SmartSEM Program Suite comprises the EM server which implements the internal communi cation between control software and microscope hardware plus several programs and utilities The main purpose of the SmartSEM Program Suite is to access all necessary microscopy parame ters and software features to capture SEM data and optimize image acquisition Acces...

Page 66: ...ication Access Windows start menu SmartSEM Service Program Description Calibration Wizard Service activities for ZEISS service representatives only GeminiSEM Align ment Wizard Service activities for ZEISS service representatives only Gun Monitor Enables you to monitor important parameters of the microscope GUN Service Service activities for ZEISS service representatives only Service Centre Provide...

Page 67: ...n requirements are to be observed and adhered to After installation or retrofitting thor oughly check that the Microscope System is in a safe operational state making sure in particular that all protective covers e g protection against laser radiation have been installed Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 67 ...

Page 68: ...These safety warnings have to be obeyed at any time by every person in the same room as the microscope WARNING Radiation hazard due to X rays X rays are generated inside the microscope during operation This is unavoidable because elec trons are accelerated by voltages up to 30 kV 4 Do not remove any parts around the column and chamber that are essential for radiation protection 4 Use genuine ZEISS...

Page 69: ...gizing the Microscope Before energizing the microscope make sure that the following safety warnings have been read and fully understood by each person who is in the same room as the microscope at any time WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During specimen ...

Page 70: ... with installed EMO Circuit set the Main Switch to the OFF position 4 without EMO Circuit unplug the power cord by unplugging the CEE connector from the CEE FEMALE RECEPTACLE of the mains supply WARNING Restart after emergency off If the reason for the emergency off is not eliminated it may be dangerous to restart the micro scope 4 If the microscope has been de energized due to an emergency ensure...

Page 71: ...rcuit and to be able to switch on the microscope again 5 2 2 Starting the Microscope Info If the system was powered off for a longer time period the ion getter pump might fail to start In this case bake out the gun head supervisor user rights required or contact your local ser vice center Refer to Baking out the Gun Head 122 Prerequisite ü The microscope is energized Procedure 1 At the front of th...

Page 72: ...the microscope 5 3 1 Calling up the Help There are different ways to access topics in the Online Help Function Menu Shortcut Control Elements Startup page Help F1 Table of Contents Help Contents Ctrl F1 Context sensitive Shift F1 F1 on focus Question mark icon in the main window and in modal dialogs Detailed information about using the help system is given in the Online Help directly 5 3 2 Keyboar...

Page 73: ... from display CTRL A Switches Annotation panel ON CTRL B Display Toolbar View dialog CTRL D Toggle Data Zone ON OFF CTRL E Calls the Export TIFF dialog CTRL F Starts Auto Focus fine CTRL SHIFT F Starts Auto Focus coarse CTRL G Switches GeminiSEM Control Panel ON CTRL I Switches SEM Status Panel ON CTRL M Switches to Annotation and inserts Point to Point Marker CTRL ALT M Enable Disable the Movable...

Page 74: ... the procedure the description uses the GeminiSEM Control panel and status bar functions in the SmartSEM software The procedure consists of the following steps Preparing the Specimen Holder 74 Loading the Specimen Chamber 76 Locating the Specimen 79 Switching on the Gun 80 Switching on the EHT 80 Acquiring an Image 81 Optimizing the Image 83 Saving the Image 85 5 4 1 Preparing the Specimen Holder ...

Page 75: ...heet of the chemical The ma terial safety data sheet can be obtained from the supplier of the chemicals NOTICE Environmental risk due to disposal of aggressive or toxic chemicals When disposing of aggressive or toxic chemicals there is a threat of damage to the environ ment 4 When disposing of waste that has been generated during a service operation e g used ro tary pump oil comply with all nation...

Page 76: ...76 Venting the Specimen Chamber 77 Mounting the Specimen Holder 77 Evacuating the Specimen Chamber 78 5 4 2 1 Displaying the GeminiSEM Control Panel Prerequisite ü The SmartSEM user interface is started Procedure 1 From the Menu Bar select Tools Goto panel à The Panel Configuration Bar is displayed It contains an alphabetical list of functions 2 Double right click GeminiSEM Control à The GeminiSEM...

Page 77: ...iciently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility fatigue leave the room immediately and inform the facility s safety officer Procedure 1 In the GeminiSEM Control panel select the Vacuum tab 2 Click Vent à The Vent message box is displayed 3 To start ven...

Page 78: ...mber door NOTICE Contamination caused by fingerprints Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times 4 Always wear lint free gloves when touching the specimen specimen holder or stage Procedure 1 Carefully open the chamber door 2 If a specimen holder is mounted onto the specimen stage remove it by sliding it out of the dovetail rails 3 Mount the pr...

Page 79: ... the Stage Navigation Bar via Stage Navigation 2 Click Settings à The Stage Navigation Settings dialog is displayed 3 In the Stage Navigation Settings dialog click Show Holder Gallery à The Sample Holder Gallery dialog is displayed 4 In the Sample Holder Gallery dialog click the specimen holder you are using 5 Activate the Is Available checkbox 6 Close the Sample Holder Gallery dialog 7 Close the ...

Page 80: ...procedure has been com pleted 4 In the right part of the Status Bar click à The pop up menu for vacuum gun and EHT activation is displayed 5 Click Gun On and monitor the gun vacuum à The gun runs up à This may take up to 5 minutes 5 4 5 Switching on the EHT When you switch on the EHT the gun starts emitting electrons WARNING Radiation hazard due to X rays X rays are generated inside the microscope...

Page 81: ...tral Aperture Gemini 1 Column and Gemini 3 Column Procedure 1 In the GeminiSEM Control panel select the Control tab 2 In the Beam section from the Aperture drop down list select aperture no 1 à The central aperture is set 5 4 6 2 Selecting the Gun Mode Gemini 2 Column Procedure 1 In the GeminiSEM Control panel select the Control tab 2 In the Beam section select Imaging à The gun mode is set 5 4 6 ...

Page 82: ...Adjusting Brightness and Contrast Procedure 1 In the GeminiSEM Control panel select the Imaging tab 2 Activate the Auto checkbox next to the Auto B Target scroll bar 3 Activate the Auto checkbox next to the Auto C Target scroll bar à After a few seconds the brightness and contrast are adjusted to the optimal value auto matically 5 4 6 8 Visualizing Details on the Specimen Surface Procedure 1 Selec...

Page 83: ...gnification and the focus hold down the left mouse button or the mouse wheel respectively and drag the mouse within the Image Area 5 4 7 2 Moving the Field of View at High Magnifications If you want to move the field of view at high magnifications use the Beam Shift function instead of moving the stage Procedure 1 In the GeminiSEM Control panel select the Control tab 2 In the Alignment section cli...

Page 84: ...l should just be pulsating without shifting 7 In the Focus Wobble window click OFF to deactivate focus wobble à The Focus Wobble window closes 8 Refocus the image 5 4 7 5 Selecting the Scan Speed Procedure 1 In the Toolbar from the Faster Slower drop down list select Scan Speed 7 Alternatively in the GeminiSEM Control panel select the Imaging tab and from the Scan Speed drop down list select Scan ...

Page 85: ... the Schottky emitter Normal gun mode is suitable for most applications Imaging Gun Mode In Imaging gun mode the temperature of the Schottky emitter and the extraction voltage are re duced in comparison to the Normal gun mode This leads to a reduction of the energy spread of the primary electrons Overall the probe current in Imaging gun mode is about half the probe cur rent in Normal gun mode Imag...

Page 86: ...obe Current With the Gemini 2 column you can set a lower probe current to analyze surface details at a high resolution or higher probe currents for analytical purposes e g to analyze the material of the specimen The Optimum probe current switches to a cross over free condenser setting and achieves the highest resolution This setting is effective for high magnifications Lower probe currents are sui...

Page 87: ...c trons and no backscattered electrons leave the Faraday cup Info The specimen current absorbed current is the fraction of the incident probe current beam current that hits the specimen and is not emitted as secondary electrons backscattered elec trons or transmitted electrons In case there is no other signal emission from the specimen the specimen current equals the incident probe current that hi...

Page 88: ...s preset by the factory or by the ZEISS service representative Within certain limits the operator may carefully increase the extractor voltage in order to optimize the probe current for particular applications Info Use a Faraday cup to measure the probe current when changing the extractor voltage Info The newly set extractor value is only valid for the current work session After a restart of the S...

Page 89: ...o change the installed configuration of your microscope contact your local ZEISS service representative Procedure 1 From the Menu Bar select View SEM Status à The SmartSEM Status dialog is displayed 2 In the Select tab click Aperture Type 3 Select the Display tab à The parameter Aperture Type is displayed 5 6 2 Determining the Installed Aperture Configuration Gemini 2 Column The achievable maximum...

Page 90: ...for most applica tions Small apertures are suitable for high resolution imaging or current sensitive specimens A larger aperture generates a larger probe current and is used for applications that require a high beam brightness e g EDX Changing to a smaller larger aperture will reduce increase the convergence angle accordingly This could lead to decrease in resolution Procedure 1 In the GeminiSEM C...

Page 91: ... to about 10 in overview mode 5 7 Finding Appropriate Detector Settings 5 7 1 Selecting a Detector You need to select an appropriate detector depending on the application and the pressure mode In addition to the standard SE detector several optional detectors are available For information on special set up procedures for the detectors refer to Setting up the InLens SE Detector 92 Setting up the SE...

Page 92: ...0 5 mm Short working distances are preferable for good detection efficiency 10 kV 20 kV 2 5 mm Info Avoid strong specimen tilting for the InLens SE detector Procedure 1 In the GeminiSEM Control panel select the Imaging tab 2 From the Signal A drop down list select InLens 3 Adjust the EHT and the working distance WD according to the suggestions in the table in order to optimize the image 5 7 3 Sett...

Page 93: ...ble in order to optimize the image Info For detailed information on working with the SE detector refer to Acquiring an Image 74 5 7 4 Setting up the VPSE Detector The VPSE detector is designed for VP applications The VP mode enables analyzing and imaging of non conducting strongly gassing or moist specimens without any need for specimen preparation Fig 43 A rosemary leaf The following settings are...

Page 94: ...tings 1 30 kV 7 10 mm C2D Bias Adjustable from 0 to 100 Typical 80 A too high bias causes electrical breakdown in the detector If you observe bright lines or flashing in the image reduce the C2D Bias until the artifacts disappear Beamsleeve bias should be set to 0 V To reduce image disturbances do not use scan speeds faster than 4 Procedure 1 In the GeminiSEM Control panel select the Imaging tab 2...

Page 95: ...ional imaging or for topographical imaging Fig 45 The crystalline structure of a silicon device The following settings are recommended for the AsB detector EHT Typical WD Detector Settings 1 5 kV 30 kV 3 10 mm Use compositional mode for obtaining an image that is high in atomic number con trast Use topography mode for showing sur face details Use individual settings for channeling contrast Procedu...

Page 96: ...ry High The BSD Gain depends on the signal strength 5 7 7 Setting up the AsB4 Detector The AsB4 detector is optionally available When ordered this detector replaces the AsB detector The AsB4 detector enables four parallel outputs for simultaneous compositional and topographi cal imaging Each of the four channels can be selected separately The following settings are recommended for the AsB4 detecto...

Page 97: ...ts 6 Set mode of the quadrants Click a quadrant symbol to toggle its status between on white inverted black and off gray 7 To choose the respective mode click BSD COMPO or BSD TOPO The default setting for BSD is BSD COMPO All four segments are set to on and an image that is high in atomic number contrast is obtained 8 If you want to change the default setting to BSD TOPO click BSD Set TOPO 9 From ...

Page 98: ... topography top right The outer segment S3 S6 shows mainly topography bottom left The final image shows the combined signal of all segments bottom right The following settings are recommended for the aBSD aBSD LH VP BSD detector EHT Typical WD Detector Settings 0 5 30 kV 5 12 mm Compositional mode for obtaining an image that is high in atomic number contrast Use topographic mode for showing surfac...

Page 99: ... choose the respective mode click BSD COMPO or BSD TOPO The default setting for BSD is BSD COMPO All six segments S1 S6 aBSD or five seg ments S1 S5 aBSD LH VP BSD are set to on and an image that is high in atomic number contrast is obtained The default mode for BSD TOPO is S1 off S2 off S3 on S4 on S5 inv and S6 inv aBSD or S1 off S2 on S3 on S4 inv and S5 inv aBSD LH VP BSD 8 If you want to chan...

Page 100: ...information about the material contrast In the final image heavy elements are repre sented by brighter pixels and light elements are represented by darker pixels By adjusting the filtering grid energy selected BSE images can be obtained If the filtering grid voltage is set to 0 SE and BSE mixed images can be acquired Fig 47 Silver nanoparticles embedded in zeolite imaged at 1 5 kV The following se...

Page 101: ...age 5 7 12 Setting up the aSTEM Detector The aSTEM detector is used for compositional imaging or topographical imaging of ultrathin spec imens The aSTEM detector is available either with one video output channel aSTEM1 or with four video output channels aSTEM4 The aSTEM detector is optionally available The aSTEM detector is equipped with several separate diode segments The signals of the seg ments...

Page 102: ... An anchor symbol is displayed in the selected zone 3 From the Signal A drop down list select a STEM detector e g aSTEM1 4 In the Panel Configuration Bar double click STEM Control To open the Panel Configuration Bar from the Menu Bar select Tools Goto Panel à The STEM Control dialog is displayed In the upper section the STEM Control dialog displays the status of the diode seg ments The status is e...

Page 103: ...detector EHT Typical WD 5 kV 30 kV 6 10 mm min 4 mm Procedure 1 In the GeminiSEM Control panel select the Imaging tab 2 From the Signal A drop down list select CL 3 Adjust the EHT and the working distance WD according to the suggestions in the table in order to optimize the image 5 8 Working with Variable Pressure VP mode offers the possibility of analyzing and mapping non conducting strongly gass...

Page 104: ...ct the Control tab 2 In the Variable Pressure section click VP à The acceleration voltage decreases to zero the column chamber vale and the Turbo iso lation valve close the Roughing backing valve and the Gas flow valve open à The pressure in the specimen chamber is increased until the selected value is reached à The system sets the chamber pressure to the value displayed in the VP Target field If ...

Page 105: ...eamsleeve aperture Mode and chamber pres sure Application No beamsleeve VP up to 60 Pa Nano VP not available XVP not available Maximum field of view con figuration with the VPSE de tector 350 µm Nano VP up to 150 Pa XVP up to 500 Pa High resolution configuration for lowest skirt effect and highest chamber pressure 800 µm Nano VP up to 40 Pa XVP up to 150 Pa Large field of view configura tion with ...

Page 106: ... by the moving specimen stage 4 Always close the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers CAUTION Closing the chamber door Fingers can be pinched when closing the chamber door 4 Use the door handle to close the chamber door 4 Ensure not to get your fingers caught in the chamber door gap NOTICE W...

Page 107: ...s 7 Use plastic tweezers to carefully take the cor rect beamsleeve aperture 350 µm or 800 µm out of the beamsleeve aperture kit Carefully insert the beamsleeve aperture 8 Close the chamber door 9 In the Beamsleeve Configuration wizard select the beamsleeve aperture you just have in stalled 10 Click Finish à The beamsleeve is retracted and the system is pumping 11 Remove the stopper from the slide ...

Page 108: ...cted 3 Click Beamsleeve In to insert the beamsleeve aperture again 4 Check the alignment of the inserted beamsleeve aperture again You will observe that the aperture is not centered anymore This is due to friction that oc curs during insertion 5 Use the x and y alignment knobs again Align the beamsleeve aperture in a way so that it will be centered after the next insertion 6 Retract and insert the...

Page 109: ...o the objective lens for some reason the system is going back to High Vacuum mode and an error message occurs in SmartSEM Beam sleeve is not vacuum tight System is going back to HV mode In Nano and XVP mode the vacuum system permanently monitors the pressures in the micro scope If a leak at the beamsleeve aperture occurs it is immediately detected and the EHT will be shut down automatically the sy...

Page 110: ...0 µm beamsleeve aperture 5 8 2 4 Changing to Nano VP or XVP Mode NOTICE Touch alarm is not available In Nano VP mode touch alarm is only available when beamsleeve bias voltage reaches approxi mately 200 V In XVP mode touch alarm is not available 4 Avoid a Beam Gas Path Length BGPL of less than 1 mm 4 Watch the moving stage in TV mode 4 To stop the moving stage immediately press F12 or press the Br...

Page 111: ...to determine the correct pressure value 5 8 3 Returning to HV Mode HV mode is the standard mode of a FESEM It offers the possibility of analyzing and mapping con ducting specimens In HV mode the pressure in the specimen chamber is less than 10 mbar Info When switching from VP to HV mode the column chamber valve closes automatically as a rel atively poor vacuum is available in the specimen chamber ...

Page 112: ...s start button Power icon Shut down 8 At the front of the plinth press the Standby button à The microscope switches to Standby mode 5 9 1 1 Exiting the SmartSEM User Interface Procedure 1 From the Menu Bar select File Exit à A system message is displayed 2 Click Yes 3 Close the EM Server à A system message is displayed 4 Click Yes 5 9 2 De energizing the Microscope Prerequisite ü The microscope is...

Page 113: ...o operate the energy isolating devices properly Prerequisite ü The microscope has been de energized Procedure 1 Verify that the microscope has been de energized properly 2 To secure the microscope against accidental re activation lock the energy isolating devices 5 10 Performing an Emergency Shutdown NOTICE Components in the high voltage circuitry When the microscope especially the gun is fully on...

Page 114: ...t possible performance of the Microscope System it is essential to perform pre ventive maintenance on a regular basis The recommended intervals depend on the total uptime of the Microscope System 24 hours 7 days a week semiannually 8 hours 5 days a week annually Info Keep track of maintenance work and contact the ZEISS service representative in time A list of ZEISS locations and authorized service...

Page 115: ...nd moisture Dirt dust and moisture can impair the Microscope System s functionality and can cause short circuits 4 The ventilation slots must be unobstructed at all times 4 Perform regular maintenance and cleaning according to the instructions in this document and according to the instructions in the applicable documents 4 Make sure that no cleaning liquid or moisture gets inside the Microscope Sy...

Page 116: ...th may be used for cleaning parts of the microscope Where cleaning with isopropanol is allowed and necessary is mentioned in the relevant chapters of the manual Covers of the microscope which have been secured by a screw must not be removed Please con tact the Zeiss service in case cleaning is necessary below these covers 116 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 117: ... up Contact your local ZEISS ser vice representative to have the field emission gun replaced Image is bad at low EHT e g 1 kV Working distance is too long Reduce the working distance to a maximum of 7 mm Image shifts when you change the stigmator Focused live image ap pears to be blurred in one direction Astigmatism Refer to Calibrating the Stig mator 124 InLens image is noisy Working distance is ...

Page 118: ...gas ballast at the pre vacuum pump Microscope does not vent No nitrogen Check nitrogen supply No compressed air Check compressed air supply Vac ready OK is dis played abnormally fast Penning gauge has not been identified correctly Restart the microscope If this does not solve the prob lem contact your local ZEISS service representative Gun vacuum is worse than 8 to 9 10 mbar The pumping capacity o...

Page 119: ...local ZEISS service representative 7 2 2 Defining the Post Initialization Position of the Stage You can configure the position to which the stage drives after the initialization procedure Other wise the stage drives to the center position CAUTION Moving the specimen stage Fingers can be trapped by the moving specimen stage 4 Always close the chamber door before moving the specimen stage 4 To remov...

Page 120: ...e ü Requires the Supervisor privilege Procedure 1 From the Windows start menu select SmartSEM SmartSEM Administrator à The SmartSEM Administrator Log on window is displayed 2 Enter user name and password 3 To confirm click OK 4 The SmartSEM Administrator window is displayed showing the user list 5 Click Column Stage 6 In the Stage Options section double click the Joystick TV Angle input field 7 En...

Page 121: ...or before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers CAUTION Closing the chamber door Fingers can be pinched when closing the chamber door 4 Use the door handle to close the chamber door 4 Ensure not to get your fingers caught in the chamber door gap NOTICE Contamination caused by fingerprints Contamination caused by...

Page 122: ...Baking out the Gun Head The pumping capacity of the ion getter pump decreases in the course of time thus deteriorating the gun vacuum This can be remedied by an ion getter pump bakeout as a regular maintenance procedure The procedure consists of the following steps Switching off the Gun 122 Starting the Bakeout 123 Switching on the Gun 80 7 3 1 1 Switching off the Gun NOTICE Schottky field emitter...

Page 123: ...elect a bakeout cycle For 2 hours heating 1 5 hours cooling select Quick For 8 hours heating 1 5 hours cooling select Overnight For 43 hours heating 7 hours cooling select Weekend For a cycle defined by the operator select User 4 To start the bakeout procedure click Bakeout Start 7 3 2 Calibrating the Probe Current This function enables you to automatically calibrate the probe currents within a fe...

Page 124: ...g Bal Period scroll bar INFO A good starting value is 1000 For higher scan speeds slower increase the value For lower scan speeds faster reduce the value 4 Set the stigmator balance amplitude via the Stig Bal Amplitude scroll bar INFO A good starting value is 100 For bigger magnifications decrease the value 5 Adjust the stigmator via the Stig Centre navigation box 6 If the focused live image is st...

Page 125: ...ting to the skin and mucous membranes The separate safety data sheet contains additional information 4 Avoid contact with skin 4 Wear suitable gloves 4 In case of contact with the eyes rinse immediately with plenty of water and seek medical advice 4 After contact with the skin wash immediately with plenty of water and soap CAUTION Isopropanol Isopropanol is highly flammable and irritating to the e...

Page 126: ...uence your image quality or Nano VP XVP performance The procedure consists of the following steps Removing the Beamsleeve Aperture 126 Cleaning and Re inserting the Beamsleeve Aperture 127 7 6 1 1 Removing the Beamsleeve Aperture Procedure 1 From the Menu Bar select Tools GoTo Panel à The Panel Configuration Bar is displayed showing an alphabetical list of functions 2 Double click Beamsleeve Confi...

Page 127: ...use moderate pressures below 1 bar and a distance of 5 cm NOTICE Do not touch the tip of the beamsleeve as it is very thin and sensitive to mechanical strain Do not try to clean the beamsleeve aperture mechanically with the help of tools tissues etc 5 Put the O ring back again onto the beamsleeve aperture à It is now ready for operation 6 Re Insert the cleaned beamsleeve aperture 7 7 PC 7 7 1 Clea...

Page 128: ...er WARNING Biological hazards Biological substances may pose a threat to the health of humans and other living organisms 4 Keep a logbook of the biological substances loaded into the microscope and show it to the ZEISS service representatives before they perform any work on the microscope WARNING High leakage current High leakage currents are present in the microscope Contact may cause burn or ele...

Page 129: ...fficiently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility fatigue leave the room immediately and inform the facility s safety officer Procedure 1 Switch off the Microscope System 2 Pull the mains plug 8 2 Transport and Storage WARNING Tilting hazard when remov...

Page 130: ...epresentative The following regulations must be observed before and during transport Check if there is any moving equipment available on site that can be used to safely transport the Microscope System to the installation room In clean room environments this check is mandatory The Microscope System may only be transported in air suspended vehicles Moving parts must be secured during transport to pr...

Page 131: ...scope Ensure all hallways and corners are wide enough to be passed with the hand pallet truck Conditions during Storage and Transport The packed microscope has to be stored in a dry place Allowable temperature Allowable temperature during on site storage and transport Between 10 C and 70 C If a GIS system is part of the microscope the GIS precursors have to be transported and stored within the pre...

Page 132: ...als there is a threat of damage to the environ ment 4 When disposing of waste that has been generated during a service operation e g used ro tary pump oil comply with all national and local safety and environmental protection reg ulations Info Detailed information on disposal and recycling is available from your ZEISS Sales Service Part ner 8 4 Decontamination A decontamination statement must be s...

Page 133: ...ources cannot interfere with image acquisition The Microscope System should not be installed near win dows with direct sunlight or radiators Compliance with the installation requirements of the Mi croscope System and the availability of the requested supplies is the responsibility of the customer and has to be provided at the time of installation Due to continuous development we reserve the right ...

Page 134: ...formance 24 h per day regardless of whether the microscope is in operation or switched off 21 4 C Recommended best temperature stability 0 5 C h Long term recommended stability 2 C 24 h Relative humidity 65 Atmospheric pressure altitude 2000 m above sea level to guarantee an undisturbed operation Pollution degree 2 Mains connection Parameter Value Nominal AC voltage 208 230 VAC L1 N L2 PE The prov...

Page 135: ...60898 Circuit breaker type Type K Residual Current Device RCD 100 mA according to IEC EN 60898 Ampere interrupting capacity AIC 1500 A rms without external EMO box 10000 A rms with external EMO box Max leakage current relevant for Residual Current Device 15 mA at 208 230 VAC without further op tions which need 230 V supply Short Circuit Current Ratio SCCR 3 5 kA Protection class Class I Overvoltag...

Page 136: ...tation compensation Automatic correction of apparent image rotation with changes in working distance Beam shift For precise adjustment of image position at high magnifications Width 200 µm at 20 kV and WD 8 5 mm Tandem Decel op tional Tandem decel module to apply negative bias to the specimen Bias voltage can be set to 1 kV 2 kV 3 kV 5 kV and continuously varied between 50 V and 100 V in steps of ...

Page 137: ...ut default Parallel detection processing and display of up to 4 channels Any 2 detector signals can be mixed for enhanced image information TV Camera image and detector images can be displayed simultane ously InLens detectors InLens SE detector Column mounted scintillator detector with optically coupled photo multiplier for high efficiency surface sensitive InLens SE detection EsB detector optiona...

Page 138: ...and quantitative 3D metrology aSTEM detector optional Pneumatically retractable multi mode annular Scanning Transmission Electron Microscopy aSTEM detector with 12x specimen holder en ables bright field BF dark field DF oriented dark field ODF and high angle annular dark field HAADF transmission imaging C2D detector optional Cascade Current Detector for detecting SE signal under variable pres sure...

Page 139: ...ll the Microscope System in a dark room where artificial illumination sunlight or other light sources cannot interfere with image acquisition The Microscope System should not be installed near win dows with direct sunlight or radiators Compliance with the installation requirements of the Mi croscope System and the availability of the requested supplies is the responsibility of the customer and has...

Page 140: ... disturbance from other installed ma chines ZEISS recommends using a separate power connection to the main distribution panel Nominal frequency 50 60 Hz Main Power Plug The workstation is delivered with a power cord 3x AWG10 UL style 5 m long with crimps at the wires for a fixed connection Those are labeled according to EU standards Black LIVE White NEUTRAL Green PROTECTIVE EARTH A fixed connectio...

Page 141: ...rrent selection Continuously variable in 1 pA steps through Iprobe slider Magnification Range 8x 2 000 000x referenced to Polaroid 5 4 5 image for mat Adjustment Continuously variable in either coarse or fine modes Auto Compensation Magnification is precisely corrected automati cally for changes in working distance or acceleration voltage Calibration Display magnification precisely corrected for c...

Page 142: ...e current settings Beam shift For precise adjustment of image position at high magnifications Width 200 µm 100 µm at 20 kV and WD 8 5 mm Specimen Chamber and Stage Parameter Description Specimen chamber dimensions 360 mm inner diameter 270 mm height Free accessory ports 12 accessory ports on the chamber are provided four of them for an alytic applications with take off angle of 35 Analytical worki...

Page 143: ...e displayed simultane ously InLens detectors InLens SE detector Column mounted scintillator detector with optically coupled photo multiplier for high efficiency surface sensitive InLens SE detection EsB detector optional Column mounted high efficiency scintillator detector with optically coupled photomultiplier for detection of energy and angle selective backscattered electrons Filtering grid adju...

Page 144: ...eld BF dark field DF oriented dark field ODF and high angle annular dark field HAADF transmission imaging C2D detector optional Cascade Current Detector for detecting SE signal under variable pres sure with high efficiency Detector with floating amplifier electronics for enhanced imaging in Variable Pressure mode up to 500 Pa Delivers detail at low kV for specimens that demand higher pressures e g...

Page 145: ...tion sunlight or other light sources cannot interfere with image acquisition The Microscope System should not be installed near win dows with direct sunlight or radiators Compliance with the installation requirements of the Mi croscope System and the availability of the requested supplies is the responsibility of the customer and has to be provided at the time of installation Due to continuous dev...

Page 146: ... disturbance from other installed ma chines ZEISS recommends using a separate power connection to the main distribution panel Nominal frequency 50 60 Hz Main Power Plug The workstation is delivered with a power cord 3x AWG10 UL style 5 m long with crimps at the wires for a fixed connection Those are labeled according to EU standards Black LIVE White NEUTRAL Green PROTECTIVE EARTH A fixed connectio...

Page 147: ... than 0 2 per hour Probe current selection via seven apertures six apertures in case of 100 nA configuration with electromagnetic selection and precise alignment Optional OptiProbe module for continuous probe current adjust ment Magnification Range 1x 2 000 000x referenced to Polaroid 5 4 5 image for mat in Standard Overview Mode Electron source Filament Schottky field emitter Automatic emitter ru...

Page 148: ...ns with take off angle of 35 Analytical working distance 8 5 mm Specimen stage Type 5 axes motorized eucentric controlled via the SmartSEM user interface operated by a dual joystick control box Mounting Drawer type door Movements X Y 130 mm Z 50 mm T 4 to 70 R 360 continuous 3 µm repeatability in x y at 0 tilt INFO The movements may be reduced by specimen size operating conditions and accessories ...

Page 149: ... BSE detector enables materials contrast crystal orientation and topo graphic imaging Enables in situ 3D surface reconstruction and quanti tative 3D metrology VP BSD detector optional for NanoVP mode Pneumatically retractable 5 segment multi mode solid state BSE de tector integrated into the beamsleeve aperture enables materials con trast crystal orientation and topographic imaging Enables in situ...

Page 150: ... to 10 μA Standard VP option Parameter Description Vacuum range Vacuum range from 5 Pa to 60 Pa adjustable in steps of 1 Pa VP detection At least one of the following detectors must be selected in the stan dard VP option High speed Variable Pressure Secondary Electron Detector VPSE High efficiency Cascade Current Detector C2D Backscatter Electron Detector aBSD aBSD LH NanoVP option Parameter Descr...

Page 151: ...pe such as electron optic lenses parts of the electronics and the turbo molecular pump are water cooled Any cooling solution has to fulfil the following re quirements Parameter Requirement Water flow rate 60 70 l h Pressure Adjustable up to 3 bar Water tempera ture 20 22 C Stability 0 5 C 10 min Heat dissipation 1 kW Connection hose 6 mm inside diameter Two pieces 10 m each are delivered Nitrogen ...

Page 152: ...lass A device industrial The microscope is de signed to operate in a controlled electromagnetic environment This means that devices with RF transmitters such as mobile phones or DECT phones must not be used in close proximity Vibrations Horizontal vibrations in x y direction Up to 10 Hz less than 5 μm s 10 60 Hz less than 10 μm s Above 60 Hz less than 14 μm s Vertical vibrations in z direction Up ...

Page 153: ... power supply 208 230 V 25 A L1 N L2 PE 2 Pre vacuum pump Equipotential bonding bar 3 Computer workplace Pressure reducer water nitrogen compressed air 4 Emergency Off EMO button optional Main shut off valves Water supply Water runback Nitrogen supply Compressed air supply Exhaust line Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 153 ...

Page 154: ...asurement con trol and laboratory use EMC requirements Part 1 General requirements EN ISO 12100 2010 Safety of machinery General principles for design Risk assessment and risk reduction EN ISO 13849 1 2015 Safety of machinery Safety related parts of control systems Part 1 General principles for design The product and its accessories have been classified as instrument category 9 laboratory equip me...

Page 155: ...esentative 10 1 Tools and Accessories Required Parts Tools Part Number Faraday cup 348342 8055 000 3 mm Allen key 000000 0015 247 1 5 mm Allen key 000000 0151 883 Small pliers Specimen holders Refer to specimen holder catalog Stubs Tweezers Lint free cloth Lint free gloves Beamsleeve Accessory Kit An accessory kit is delivered with your GeminiSEM Its main purpose is for safe and clean storage of t...

Page 156: ...ging the beamsleeve aperture 1 Storage container with 8 bores for the beamsleeve apertures 1 Plastic tweezers for handling the beamsleeves 1 Dust blower for cleaning the beamsleeve apertures from dust particles 5 Black spare O rings 5 Green spare O rings 156 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 157: ...to the beam booster so that a high beam energy is maintained throughout the entire column The beam booster technique has two main advan tages It minimizes beam widening that may occur due to stochastic electron electron interactions Consequently there is almost no loss in beam brightness even at low acceleration voltages Sec ondly the beam booster technique en hances protection against external st...

Page 158: ...an aperture where elec trons can enter but not escape Used to measure the specimen current in the mi croscope FESEM Field Emission Scanning Electron Micro scope Focus wobble Function that sweeps the focus of the objective lens backwards and forward through the focus on the specimen plane When the aperture is misaligned a lateral shift is observed GIS Gas Injection System GUI Graphical User Interfa...

Page 159: ...Micro scope Stigmator Compensates astigmatism lens aberra tion so that the electron beam becomes rotationally symmetrical Suppressor Electrode anode that suppresses un wanted thermionic emission from the shank of the Schottky field emitter T T axis Tilt TEM Transmission Electron Microscope U Voltage User Person examining a sample under the mi croscope VP Variable Pressure VPSE Variable Pressure Se...

Page 160: ...out ZEISS can be found at www zeiss com ZEISS Sales Service Partner The Sales Service Partner is generally in the field for customer support in a re gional area and or a clearly defined cus tomer group ZEISS service representative Specially trained service expert either ZEISS staff or authorized service partner of ZEISS 160 Instruction Manual ZEISS GeminiSEM series en US Rev 2 349500 8138 000 ...

Page 161: ...ls 114 Circuit breaker 124 CL detector 59 103 Column mode 90 Comissioning 69 Consumable and chemical 114 Consumables 114 Contamination 132 Control panel 60 Cover panel protective 20 D Decontamination 132 Detector 40 91 aBSD 52 98 aBSD LH 49 98 AsB 57 95 AsB4 96 aSTEM 58 101 125 BSD 125 C2D 46 94 CL 59 103 EsB 48 100 Everhart Thornley 43 InLens SE 42 92 SCD 56 101 SE 43 92 VP BSD 51 98 VPSE 47 93 Y...

Page 162: ...O ON OFF switch 22 Online help 72 Operation 69 Operator Basic 12 Training 12 Optimizing the image 83 OptiProbe 86 87 P Performance data GeminiSEM 360 133 GeminiSEM 460 139 GeminiSEM 560 145 Preventive maintenance 12 Primary electron 40 Probe current 86 87 Calibration 123 Q Quiet Mode 29 R Related documents 9 Replacing the chamber door seal 120 Requirements for personnel 11 Resetting the touch alar...

Page 163: ...Transmitted electron 40 Troubleshooting 117 Type plate 20 U User access level 64 User interface 62 User privilege 64 V Vacuum mode 103 High Vacuum HV 111 Nano VP 105 Variable Pressure VP 103 104 XVP 105 Vacuum system 28 29 Variable pressure 103 VP BSD detector 51 98 VPSE detector 47 93 W Warning labels 17 lights 17 Weight and Sizes 134 139 145 Y YAG BSD detector 55 100 Z ZEISS Service agreements 1...

Page 164: ...l Zeiss Promenade 10 07745 Jena Germany phone 49 1803 33 63 34 fax 49 3641 64 3439 info microscopy de zeiss com www zeiss com microscopy Instruction Manual ZEISS GeminiSEM series en US Rev 2 Modifications reserved Printed in Germany ...

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