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ZEISS
3 Product and Functional Description | 3.2 Main Components
Standard Detec-
tors
Detected Signals
Typical Application
Vacuum Mode
Surface structure
Topography
Optional Detectors
Detected Signals
Typical Application
Vacuum Mode
Topography and sur-
face structure in VP
mode
Topography in VP
mode
Low loss BSE up to
2 kV EHT
Surface structure
Material contrast
Angular resolved BSE
imaging with two
concentric rings
Compositional con-
trast
Angular resolved BSE
imaging with three
concentric rings
Compositional con-
trast
Angular resolved BSE
imaging with two
concentric rings
Compositional con-
trast
Nano VP, XVP
Compositional con-
trast
Channeling contrast
Absorbed primary
electrons
Quantitative material
contrast
BSE like imaging
without topography
Compositional con-
trast
Topography
Channeling contrast
(crystal orientation)
Transmitted elec-
trons
Diffraction contrast
Compositional con-
trast
Light photons
Mineralogy
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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