Zeiss GeminiSEM Series, Instruction Manual

Page: 81 / 164

ZEISS 5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
4. In the right part of the Status Bar , click .
à
The pop-up menu for vacuum, gun, and EHT activation is displayed.
5. Click EHT On .
à
The EHT runs up to 10 kV.
à
In the right part of the Status Bar , the vacuum, gun, and EHT status buttons merge to
.
5.4.6 Acquiring an Image
Info
The following procedure describes the best way to quickly obtain an image without the con-
trol panel. You can also use the control panel to adjust aperture alignment, magnification/fo-
cus and brightness/contrast.
The procedure consists of the following steps:
§ Selecting the Central Aperture | Gemini 1 Column and Gemini 3 Column [
}
81] or Selecting
the Gun Mode | Gemini 2 Column [
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81]
§
Selecting the SE Detector [
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81]
§
Setting a Fast Scan Speed [
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§ Setting a Low Magnification [
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82]
§
Adjusting Brightness and Contrast [
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§
Visualizing Details on the Specimen Surface [
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82]
5.4.6.1 Selecting the Central Aperture | Gemini 1 Column and Gemini 3 Column
Procedure 1. In the GeminiSEM Control panel, select the Control tab.
2. In the Beam section, from the Aperture drop-down list, select aperture no. 1.
à
The central aperture is set.
5.4.6.2 Selecting the Gun Mode | Gemini 2 Column
Procedure 1. In the GeminiSEM Control panel, select the Control tab.
2. In the Beam section, select Imaging .
à
The gun mode is set.
5.4.6.3 Selecting the SE Detector
Procedure 1. In the GeminiSEM Control panel, select the Imaging tab.
2. In the Detector / Active Channel section, select
Signal A = SE2 from the Signal A drop-
down list.
INFO: We recommend using the SE detector to obtain the first image. This detector pro-
vides a good signal-to-noise ratio even at long working distances.
5.4.6.4 Setting a Fast Scan Speed
Procedure 1. In the GeminiSEM Control panel, select the Imaging tab.
2. From the
Scan Speed drop-down list, select Scan Speed = 2 .
INFO: The lower the scan speed number, the faster the electron beam scans across the
specimen. Scan Speed = 2 allows you to get an image quickly.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 81