Zeiss GeminiSEM Series, Instruction Manual

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ZEISS 5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
5.4.3 Locating the Specimen
The procedure consists of the following steps:
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Positioning the Stub under the Electron Beam [
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Moving the Specimen to the Proper Height [
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5.4.3.1 Positioning the Stub under the Electron Beam
NOTICE
Driving the stage
While the stage is driven manually, there is a risk of damaging the objective lens and/or the
specimen.
4
Ensure not to hit the objective lens while driving the stage.
4
Monitor the moving stage in TV mode.
4
To stop the moving stage immediately, press F12 or press the Break push button of the
dual joystick panel.
4
Manually lower the stage before you open the chamber door. Alternatively, activate the Z
move on Vent checkbox in the Stage tab of the GeminiSEM Control panel.
Procedure 1. In the Stage Navigation Bar , select Stage Sideview from the upper drop-down list and
Stage Topview from the lower drop-down list.
INFO: To open the Stage Navigation Bar , navigate to View > Toolbars and activate
Stage Navigation Bar (for Widescreen users) . Alternatively, you can access the Stage
Navigation Bar via Stage > Navigation .
2. Click Settings .
à
The Stage Navigation Settings dialog is displayed.
3. In the Stage Navigation Settings dialog, click Show Holder Gallery .
à
The Sample Holder Gallery dialog is displayed.
4. In the Sample Holder Gallery dialog, click the specimen holder you are using.
5. Activate the Is Available checkbox.
6. Close the Sample Holder Gallery dialog.
7. Close the Stage Navigation Settings dialog.
8. In the Stage Topview section of the Stage Navigation Bar , spot the stub with the speci-
men you want to observe.
9. To drive the stub directly under the electron beam, double-click the stub.
5.4.3.2 Moving the Specimen to the Proper Height
Procedure 1. In the Stage Navigation Bar , drag the Zoom View slider to the right end, so that the
schematics are zoomed in.
2. In the GeminiSEM Control panel, select the Imaging tab.
3. In the Detector / Active Channel section, select
USB TV1 from the Signal A drop-down list.
à
The inside of the specimen chamber is visible in the Image Area .
4. Use the dual joystick to carefully move up the stage so that the stub you are using is in the
center of the upper schematic.
NOTICE Observe the camera image in order not to crash into the pole piece.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 79