Zeiss GeminiSEM Series, Instruction Manual

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ZEISS 5 Commissioning and First Operating Steps | 5.8 Working with Variable Pressure
5.8.2 Using Nano VP or XVP Mode
5.8.2.1 Mounting a Beamsleeve Aperture for Nano VP or XVP Operation
When working with Nano VP mode or XVP mode, either a 350 µm or 800 µm pressure limiting
beamsleeve aperture has to be inserted under the objective lens.
Select the correct beamsleeve aperture according to the table below. Only when mounting the
correct aperture, it is possible to switch on the beam booster and set the maximum chamber pres-
sure.
Beamsleeve aperture Mode and chamber pres-
sure Application
No beamsleeve § VP: up to 60 Pa
§
Nano VP: not available
§
XVP: not available
Maximum field of view con-
figuration with the VPSE de-
tector.
350 µm
§
Nano VP: up to 150 Pa
§
XVP: up to 500 Pa
High resolution configuration
for lowest skirt effect and
highest chamber pressure.
800 µm
§
Nano VP: up to 40 Pa
§ XVP: up to 150 Pa
Large field of view configura-
tion with medium chamber
pressures.
Parts and Tools
Designation Part no.
Beamsleeve Accessory Kit
included with VP option
349553-8012-000
Plastic tweezers -
Fig. 51: Beamsleeve aperture kit, 350 µm beamsleeve aperture (black O-ring ), 800 µm beam-
sleeve aperture (green O-ring).
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 105