Zeiss GeminiSEM Series, Instruction Manual

Page: 107 / 164

ZEISS 5 Commissioning and First Operating Steps | 5.8 Working with Variable Pressure
5. Click Next .
à
The system is vented.
à
The beamsleeve is inserted, but not fully so
that you have access to the beamsleeve
aperture inside the specimen chamber.
6. Open the chamber door.
If there is already a beamsleeve aperture in, use plastic tweezers to carefully take it out.
Return the aperture to the beamsleeve aperture kit.
It is not possible to insert another aperture at the same time.
NOTICE Be careful not to touch the objective lens or parts inside the specimen
chamber. Wear gloves and forearm protectors.
7. Use plastic tweezers to carefully take the cor-
rect beamsleeve aperture (350 µm or 800 µm)
out of the beamsleeve aperture kit.
Carefully insert the beamsleeve aperture.
8. Close the chamber door.
9. In the
Beamsleeve Configuration wizard, select the beamsleeve aperture you just have in-
stalled.
10. Click Finish .
à
The beamsleeve is retracted and the system is pumping.
11. Remove the stopper from the slide.
5.8.2.2 Aligning the Beamsleeve Aperture
After you have installed a beamsleeve aperture you should center it with the Beamsleeve Align-
ment window.
The procedure consists of the following steps:
§
Inserting the Beamsleeve Aperture [
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108]
§
Measuring the Size of the Beamsleeve Aperture [
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108]
§
Centering the Beamsleeve Aperture [
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108]
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 107