5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
ZEISS
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4
Always close the chamber door before moving the specimen stage.
4
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
CAUTION
Closing the chamber door
Fingers can be pinched when closing the chamber door.
4
Use the door handle to close the chamber door.
4
Ensure not to get your fingers caught in the chamber door gap.
NOTICE
Short working distance
When opening the chamber door, the microscope or specimen can be damaged if the speci-
men stage is at a short working distance. If a BSD detector is inserted, it can be damaged as
well.
4
Always retract any retractable detectors before opening the chamber door.
4
However, in NanoVP and XVP mode, the beamsleeve should stay inserted.
4
Always move the specimen stage to a long working distance before opening the chamber
door.
NOTICE
Contamination caused by fingerprints
Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping
times.
4
Always wear lint-free gloves when touching the specimen, specimen holder, or stage.
Procedure
1. Carefully open the chamber door.
2. If a specimen holder is mounted onto the specimen stage, remove it by sliding it out of the
dovetail rails.
3. Mount the prepared specimen holder by sliding it into the dovetail rails.
Make sure that the dovetail is placed in the correct orientation so that the flat side of the
dovetail of the specimen holder is flush with the milled edge of the specimen stage.
4. Carefully close the chamber door.
à
The specimen holder and the specimen inside the chamber are visible in the
Image
Area
.
5.4.2.5 Evacuating the Specimen Chamber
Procedure
1. In the GeminiSEM Control panel, select the
Vacuum
tab.
2. Click
Pump
.
à
Several vacuum status messages display the current vacuum levels.
à
As soon as the appropriate vacuum level is achieved, the vacuum status message
Vac
Status = Ready
is displayed.
This may take up to 5 minutes.
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Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
