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ZEISS
9 Technical Data and Conformity | 9.3 Performance Data and Specifications | GeminiSEM 460
Parameter
Value
Circuit breaker (at house installation)
25 A (type K) according to IEC EN 60898
Circuit breaker type
Type K
Residual Current Device (RCD)
100 mA according to IEC EN 60898
Ampere interrupting capacity (AIC)
1500 A rms without external EMO box
10000 A rms with external EMO box
Max. leakage current (relevant for Residual
Current Device)
15 mA at 208–230 VAC (without further op-
tions which need 230 V supply)
Short Circuit Current Ratio (SCCR)
3.5 kA
Protection class
Class I
Overvoltage Category
II
Electron Optics
Parameter
Description
Acceleration volt-
age
Range:
20 V to 30 kV
Adjustment:
Continuously variable in 10 Volt steps.
Probe current
40 nA high resolution configuration:
3 pA – 40 nA
100 nA high current configuration:
3 pA – 100 nA
300 nA high current configuration:
3 pA – 300 nA
Stability:
Better than 0.2 % per hour.
Probe current selection:
Continuously variable in 1 pA steps
through Iprobe slider
Magnification
Range:
8x – 2,000,000x referenced to Polaroid 5" × 4.5" image for-
mat.
Adjustment:
Continuously variable in either coarse or fine modes.
Auto-Compensation:
Magnification is precisely corrected automati-
cally for changes in working distance or acceleration voltage.
Calibration:
Display magnification precisely corrected for changes in
hard copy output device.
Electron source
Filament:
Schottky field emitter.
Automatic emitter run-up:
Safe controlled run-up to the target
emitter conditions.
Indicators:
Status information to indicate all emitter parameters.
Objective lens
Type:
Gemini II electromagnetic/electrostatic objective lens system
(80º conical final-lens) with water cooling for best thermal stability
and reproducibility including double condenser lens.
Hysteresis correction:
for the removal of lens hysteresis.
Column:
Compact column design, integrated Mu-metal shielding to
limit sensitivity to stray fields. Factory aligned column for minimum
astigmatism and beam shift.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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