Zeiss GeminiSEM Series, Instruction Manual

Page: 99 / 164

ZEISS 5 Commissioning and First Operating Steps | 5.7 Finding Appropriate Detector Settings
Procedure
1. From the Panel Configuration Bar , select BSD Control .
The BSD Control panel enables you to change the polarity of the segments, select BSD
modes, and set the BSD gain.
à
The BSD Control panel is displayed.
The BSD Control panel looks slightly differ-
ent for the aBSD detector (left) and the
aBSD-LH/VP-BSD detector (right).
2. In the BSD Control panel, click BSD in to insert the detector.
à
The stage is lowered by 20 mm to give space for the detector to be inserted.
à
The detector is inserted.
3. In the GeminiSEM Control panel, select the Imaging tab.
4. From the
Signal A drop-down list, select BSD1 or BSD4 A depending on your detector
type and configuration.
INFO: A refers to the video channel. B, C, and D are also available if you have the four-
channel version.
5. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6. In the BSD Control panel, click a quadrant symbol to toggle its status between on (white),
inverted (black), and off (gray).
7. To choose the respective mode, click BSD: COMPO or BSD: TOPO .
The default setting for BSD is BSD: COMPO . All six segments (S1–S6, aBSD) or five seg-
ments (S1–S5, aBSD-LH/VP-BSD) are set to on and an image that is high in atomic number
contrast is obtained.
The default mode for
BSD: TOPO is S1 off, S2 off, S3 on, S4 on, S5 inv and S6 inv (aBSD)
or S1 off, S2 on, S3 on, S4 inv and S5 inv (aBSD-LH/VP-BSD).
8. If you want to change the default setting to BSD: TOPO , click BSD: Set TOPO .
9. From the BSD Gain drop-down list, select Low , Medium , High , or Very High .
INFO: Since the detector has a limited speed, it is recommended to use scan speed 6 or
higher (slower), especially at small magnifications. The lower the gain is, the faster is the
detector.
5.7.9 Setting up the YAG BSD Detector
NOTICE
Inserting the
YAG BSD
detector
When you manually insert the detector, there is a risk to damage the YAG BSD detector.
4
Use the chamberscope image to observe if there is enough space between the objective
lens and the specimen.
4
If there is not enough space between the objective lens and the specimen, then lower the
stage position before you insert the detector.
4
Insert the YAG BSD detector carefully and observe the moving YAG BSD detector via the
chamberscope.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 99