Ulvac UTM3400 Series, Instruction Manual

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SECTION 9 TROUBLESHOOTING
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9
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39 EI:DEW ERROR Internal condensation Check that the ambient temperature
and humidity around the pump and
the temperature of cooling water are
within the specified range.
Check there are no solids piled up in
the water valve.
Drive again after leave it for a while. 4.1
5.3
10
43 EI:PARAM ERROR Defective circuit in the
power supply unit. Turn the power on again after the
pump stops. The pump must be
repaired if the problem occurs again.
11
44
66
67 EI:CPU ERROR
MB:DSP ERROR
MB:DSP OVERFLOW Abnormal operation of
circuit in the power
supply unit. Check that the ambient temperature
around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Check that equipment causing noise
is not used around the pump and
power cable. 4.1
5.2
5.3
12
48 EI:ACCEL OVERTIME Rotation speed does
not increase at start-
up. Check that the outlet and inlet
pressures are not too high.
Check for leakage.
Check that too much purge gas is not
flowing. 6.2
13
49 TMP:CAN NOT START Pump does not rotate. Adhesion of reaction products or
damage to the protective bearing is
the possible cause. Remove the
pump from the unit and check that the
rotor blades rotate smoothly at the
inlet. An overhaul is required if blades
do not rotate smoothly.
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51
52
53
54
55
56
57
58
59
60 MB:VIBRATION2 X1
MB:VIBRATION2 Y1
MB:VIBRATION2 X2
MB:VIBRATION2 Y2
MB:VIBRATION2 Z
MB:VIBRATION1 X1
MB:VIBRATION1 Y1
MB:VIBRATION1 X2
MB:VIBRATION1 Y2
MB:VIBRATION1 Z Strong external shock
or vibrations. If the shock or vibrations are transient
re-acceleration is possible. If the
shock or vibrations occur frequently,
stop the pump and remove the source
of the shock or vibrations; or re-
examine the pump mounting method. 5.2
15
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62
63
64
65 MB:SENSOR ERR. X1
MB:SENSOR ERR. Y1
MB:SENSOR ERR. X2
MB:SENSOR ERR. Y2
MB:SENSOR ERR. Z The rotor does not
move due to adhering
matter or a damaged
touchdown bearing. Remove the pump and check that the
rotor rotates smoothly. The pump
requires an overhaul if the rotor does
not rotate or the resistance to rotation
is large.
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68
69 MB:BALANCE AXIS1
MB:BALANCE AXIS2 Rotor inside the pump
is out of balance. Adhesion of reaction products is a
possibility. An overhaul is required.
Alarm
code
Alarm name Possible cause Remedy
Sec-
tion