Ulvac UTM3400 Series, Instruction Manual

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SECTION 2 IDENTIFICATION AND FUNCTION
8
2
2.1
Pump Main Unit
Fig.2-1 Pump Main Unit
(1) INLET FLANGE ............................... Inlet flange, joint the turbo molecular pump,
VG300, VG350 and ISO320F are available.
(2) PORT FOR GAS PURGE................ Gas purge adaptor port, KF10, UJR 6.35, Swagelok
Φ6.35 and 4-VCR are available.
(Refer to Section 7 "GAS PURGE".)
(3) OUTLET FLANGE ........................... Outlet flange, connect a backing vacuum pump or its
related pipe connection, KF40.
(4) COOLING WATER PIPELINE......... Cooling water pipe connector, Rc1/4.
(5) WATER VALVE ............................... For protection from dew.
(Refer to Section 5.3 "Preparation for Operation".)
This valve is normally closed valve. (opened when
energizing, and closed when not energizing.)
(6) CONTROL PANEL .......................... AC input connector, power switch and local control
switch.
(Refer to Section 2.2 "Control Panel".)
(7) External I/F PANEL ......................... Communication interface.
(Refer to Section 2.3 "External I/F Panel".)