SECTION 5
INSTALLATION
34
5
5.3
Preparation for Operation
(1) This product is a water cooled model. Always provide a flow of coolant water that meets
the indicated specifications. (Note 1)
(2) Make sure no water is leaking from the coolant lines. Do not spill coolant on the pump.
(3) Confirm the cable from water valve is surely connected to VALVE connector of External
I/F panel.
(4) Make sure that there is no condensation and not high humidity environment. Do not switch
the power supply unit ON with condensation at the location indicated in Fig. 5-12.
(5) If dew condenses inside controller during operation, dew warning turns on and the water
valve is turns off so that the coolant water should not enter in the pump. If the dew is not
disappeared for a while, dew alarm turns on and decelerate the motor to avoid a controller
fault. Please use it at the temperature that the dew condensation is not generated and keep
environment humidity low. Refer to Section 9 "TROUBLESHOOTING" for the alarm.
Even if the power supply unit is OFF, do not flow coolant through it that is below dew point.
(6) Connect the power cable to AC connector of control panel.
(Note 1) Non condensing.
Water Coolant Flow Rate :
3 L/min to 4 L/min
Water Pressure :
0.2 MPa to 0.4 MPa
Temperature :
19 degrees C. to 30 degrees C.
Fig.5-12
Locations to Check for Dew Condensation
Summary of Contents for UTM3400 Series
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Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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