Ulvac UTM3400 Series, Instruction Manual, Page: 35 / 102

4.2 The Maximum Allowable Flow Rate
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4.2
The Maximum Allowable Flow Rate
(Note 1) Consult your ULVAC representative before using gasses except shown in above table.
(Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 3) The maximum allowable flow rate depends on the gas type, the Assuming the parts
connected to the molecular pump inlet and the gas purge flow rate.
4.3
Standards Fulfilled
Description
Gas type
(Note 1)
APC valve
temperature
Gas purge
flow rate
The maximum allowable flow rate
(Note 2) (Note 3)
UTM3400A-MI-AVWX
UTM3400A-MI-AFWX
UTM3400A-MI-AWWX
Ar
45 degrees C. 0 mL/min
1500 mL/min
N
2
2750 mL/min
UTM3400A-MI-CVWX
UTM3400A-MI-CFWX
UTM3400A-MI-CWWX
Ar
45 degrees C. 30 mL/min
1900 mL/min
N
2
2750 mL/min
Safety EN 61010-1
UL 61010-1
EN 1012-2
EMC EN 61326-1 Class A
EN 61000-6-2