Ulvac UTM3400 Series, Instruction Manual

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5.4 Interlock for Vacuum System
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5
5.4
Interlock for Vacuum System
(1) When using, as a backing vacuum pump, a vacuum pump with no check mechanism
(backstream flow prevention) such as dry vacuum pump, etc., install a forevacuum valve
between the turbo molecular pump and the backing vacuum pump to prevent rapid inverse
flow of exhausted gas. And close the forevacuum valve before the backing vacuum pump
stops. (Refer to Fig. 5-7.)
(2) Even when "ALARM" signal is emitted, don't cut off the power supply while "ROTATION"
signal is being emitted. Even when ALARM lamp lights, don't cut off the power supply while
ROTATION lamp lighting.
(3) If "ALARM" signal is emitted or ALARM lamp lights, shut down the backing vacuum pump
or close the forevacuum valve immediately. Furthermore, when main valve is installed
between the turbo molecular pump and the vacuum chamber, close this valve, too.
(4) Provide a flowmeter on the downstream of cooling water line, otherwise the turbo
molecular pump will shut down and otherwise set up the interlock which the pump cannot
start against cut off of water supply.
(On the condition that Dew Warning has occurred, water valve is closed for the purpose of
canceling dew condensation, therefore keep interlock from working.)
5.5
Notes on Transportation
This product is precision equipment. Do not give any strong impact or continuous vibration in
transportation, otherwise the product could be damaged. In transportation, please use a means
of transportation which have vibration-proof function (an air suspension truck, for example).
Especially when passing by rough road, we recommend that the product is transported keeping
the packing condition when it ships from ULVAC.
When the product is put on the high temperature / humidity environment for a long time, it
causes the breakdown of the product due to corrosion of mechanical parts or performance loss
of electrical parts. Please transport or store the product under an appropriate environment.