vii
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Explanation of Label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) Pump Securement Label
If the pump is not secured properly, it could
become detached and cause injury or damage to
surrounding equipment. Be sure to secure the
pump according to Section 5.1.2 "Installation of
the Pump".
(3) Remove Label
Do not remove cover, or else it may cause some
changes inside and it is failed.
(4) Cable Label
Be sure to use specified cable for this power
supply. If not, it may cause connector be broken
and power supply itself failed.
(5) Heavy Equipment Label
Be sure to lift by two or more people or use the
lifter or the crane etc. when lifting because this
product is a heavy lift.
(6) SECURITY Seal
This label certificates that the product was made
or maintained by ULVAC or by ULVAC authorized
facility. In case "this label is removed" or "there is
a mark showing once this label has been
removed", ULVAC warranty shall not be applied to
the product.
(7) Name Plate
Summary of Contents for UTM3400 Series
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Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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Page 100: ...Index Index 2 This page is intentionally left blank...