ii
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
WARNING
CAUTION
NOTICE
WARNING
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by ULVAC may do service of
products.
WARNING
Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper, or cause injury by
electrical shock.
WARNING
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injury or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injury or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.
Summary of Contents for UTM3400 Series
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Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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Page 100: ...Index Index 2 This page is intentionally left blank...