Ulvac UTM3400 Series, Instruction Manual

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SECTION 8 TURBO MOLECULAR PUMP RECONDITION
62
8
8.1
Recommended Maintenance Intervals
It is different for deterioration progress speed of each part changes greatly by pump condition.
Refer to the following list as overhaul of each process.
These are not terms of warranty.
(1) Recommended maintenance intervals for parts
These are not terms of warranty.
1) Non-active gas and Light load process
(2) Recommended maintenance intervals for other parts
1) It has the possibility that the following part is exchanged, when cleaning TMP.
2) Others
When exchanging parts, it has possibility that other parts are exchanged for improving a
reliability.
(Example : Old type lower and upper radial sensor had changed dimensions for reliability.
When exchanging them, these housing must also be exchanged.)
Process
Recommended
maintenance intervals
1
Non-active gas (Sputtering, Evaporation and so
on) and Light load process
3 years
Part name
Recommended
maintenance intervals
1 Touch down bearing 3 years
2 Shaft 7 years
It has a possibility of under 2 years
(Dependent on condition)
3 Rotor
4 Motor
7 years
5 Magnetic bearing parts
Part name
55-pin Receptacle