Ulvac UTM3400 Series, Instruction Manual

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5.1 Installation
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5.1.3.2 Connection of Cooling Water Line
(1) Supply the coolant water to coolant water IN connection of the solenoid valve for the
coolant water as shown in Fig. 5-8, and drain the cooling water pipe from coolant water
OUT connection. The valve to isolate (Lockout / Tagout) cooling water should be installed
at user equipment.
(2) Connect cooling water pipes to these pumps. When connecting the cooling water pipes,
screw the pipe joint while also holding the nozzle of the pump with a spanner in order to
avoid deforming the cooling water pipe, as illustrated in Fig. 5-9.
(3) The water valve is closed and coolant water supply is stopped at AC input OFF. Customer
prepares the cross valve and piping, the pump is bypassed, and the coolant water can be
thrown. Addition and the pipework of the valve in the customer are necessary.
Fig.5-8 Connection of Cooling Water Line
Fig.5-9 Water Coolant Tubing Connections
PIPE JOINT