Ulvac UTM3400 Series, Instruction Manual, Page: 43 / 102

5.1 Installation
29
5
Fig.5-5 How to Use of the Bolt
Table 5-2 The Recommended Fixing Bolt
(Note) The special washers are attached to the inlet flange of TMP when shipping.
Do not remove them at the time of TMP installation.
Refer to Fig. 5-6 for the details of the bolt attaching part.
Fig.5-6 Example of the Fixing Method Using the Special Washer
Table 5-3 Tightening Torque of the Fixing Bolt
Bolt-Nut (Half thread)
Fixing method Only by the inlet flange
Inlet flange VG300 VG350 ISO320F
Bolt size, Quantity M12, 12 PC
Material Stainless steel
Grade A2-70 (JIS B 1054 / ISO-3506)
Washer
Plain washer and
spring lock washer
Special washer (Note) and
spring lock washer
Bolt-Nut (All thread)
・
Tap
Fixing method Only by the inlet flange
Inlet flange VG300 VG350 ISO320F
Bolt size, Quantity M12, 12 PC
Material SCM435 (JIS G 4053 / ISO-683) or equivalent
Grade 12.9 (JIS B 1051 / ISO-898)
Washer
Plain washer and
spring lock washer
Special washer (Note) and
spring lock washer
Size of bolt Tightening torque [N•m]
M12 16 to 26