Ulvac UTM3400 Series, Instruction Manual

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CAUTION
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
In the case of the specifications with the water valve, drain the water from water pipe during
pump power on and water valve open.
After the water drained, shut water pipe by the cap which is attached at shipment.
CAUTION
This turbo molecular pump has the integrated power supply.
Do not separate the power supply from the pump, or the pump cannot be operated even if the
power supply is connected again.
CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
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Operating Precautions
(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
(2) Protect the pump from any and all types of impact during operation. Impacts can also be
transmitted via the flange, so be careful of impacts near the pump as well.
(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces
electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo
molecular pumping system ((1) pump, (2) cables, etc).
(4) This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
(6) Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or
fluorine.
(7) When using the variable speed function to change the pump rotation rate, use a rotation
rate that does not cause resonance with other devices installed at the site.
(8) Be careful to prevent a rapid pressure rise or air rush during operation.