Ulvac UTM3400 Series, Instruction Manual

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5.1 Installation
27
5
5.1.2.1 Instruction and Lifting Method
This product lift the pump in the manner shown in Fig. 5-2.
Fig.5-2 Lifting Method
Table 5-1 Eyebole Size
The center of gravity of the pump is shown in Fig. 5-3. Fix securely to avoid moving or falling
down in the event of an earthquake.
Fig.5-3 Center of Gravity of the Pump
Position Eyebolt size Number of eyebolts Remark
Vertical M12 2
Not bundled items
Inverted M8 4
Vacuum
chamber
Vacuum
chamber
PUMP
PUMP