SECTION 1
OUTLINE AND DESCRIPTIONS
2
1
1.1
Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications ;
Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・
Pump Unit with Integrated Controller
1
・
Power Cable
1
・
Standard Accessories
1 Set
Summary of Contents for UTM3400 Series
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Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
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Page 73: ...7 7GAS PURGE...
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Page 95: ...10 10WARRANTY CLAUSES...
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