4.1
Standard Specifications for Pump Unit
19
4
Alarm history
Remembers date, time, and description of last 99 alarm events.
Instantaneous power interruption
(Note 6)
If power interruption is 1 second or less, pre-interruption
functions are maintained. If interruption exceeds 1 second, the
brake is activated, which allows the pump to be restarted after
resetting.
Water valve for dew interlock
This valve is closed during power supply OFF, and the coolant
water is stopped.
This valve is opened during power supply ON, and the coolant
water is supplied.
Alarm detection
Alarms
Pump temperature, Pump startup error, Overload and
Overspin for motor, Failure of magnetic bearing,
Control system malfunction (Overtemperature inside control
system or failure of drive circuit), Power interruption,
Dew condensation, etc.
Warnings
Failure of magnetic bearing, Control system malfunction
(Overtemperature inside control system),
Dew condensation (Water valve close.)
Protective functions
Alarms
STATUS orange lamp illuminates.
Power Interruption Alarm :
Decelerated while maintaining levitation using regenerative
power.
After decelerating to specified low speed, levitation is
stopped and rotor is supported by touchdown bearing. When
power is restored, the pump can be restarted by resetting.
Dew Alarm :
The pump is decelerated after dew condensation alarm is
detected.
When other alarms occur :
Stops operation or decelerates. Magnetic levitation is
continued.
Warnings
STATUS orange lamp flashes and pump continues to function.
(Dew Warning : Water valve is closed.)
Input electric
power
Voltage
Single phase 200 to 240 VAC ±10 % (50 / 60 Hz ± 2 Hz)
Maximum power
1.2 kVA
Insulation
withstand
voltage
1500 V, 1 minute
Short circuit
current ratings
(SCCR)
200 A
Water (Note 7)
Flow rate
Pressure
Temperature
3 to 4 L/min
0.2 to 0.4 MPa
19 to 30 degrees C. (above dew point)
Water quality
Non-corrosive industrial water
Solid particle size (Max) : 0.025 mm
2
PH (@25 degrees C.) : 6.5-8.2
Electrical conductivity (@25 degrees C.) : 100-800μS/cm
(Electrical resistivity : 1250-10000 Ω•cm)
Admissible ambient
magnetic field
Radial direction
Axial direction
3 mT
15 mT
Summary of Contents for UTM3400 Series
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Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
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Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
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Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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