Index
Index-1
Index
A
AC INPUT connecter
.......................... 9
B
backing vacuum pump
......................... 8
C
cooling water
............................. 8、31
G
gas purge
................................... 18
I
inlet flange
............................... 8、13
N
NET lamp
.................................... 9
noise
....................................... 18
O
outlet flange
.............................. 8、13
P
port for gas purge
............................. 8
POWER lamp
................................ 9
Protective
................................... 13
R
REMOTE connector
.......................... 10
RESET button
................................ 9
ROTATION lamp
.............................. 9
rotor
........................................ 13
S
SERIAL connector
........................... 10
Standards
................................... 21
STATUS lamp
................................ 9
T
touch-down bearing
.......................... 13
U
UL
......................................... 21
V
VALVE connector
........................ 10、34
Summary of Contents for UTM3400 Series
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Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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