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SECTION 5
INSTALLATION
24
5
5.1
Installation
5.1.1 Pump Mounting Direction
This turbo molecular pump can be installed in vertical, horizontal, inverted, or oblique position.
The outlet port of the turbo molecular pump should face horizontally or vertically when installing
the pump horizontally and obliquely.
When an installation direction is non-appropriate, reliability of operation may deteriorate.
(Refer to Fig. 5-1)
Fig.5-1
Mounting Direction of the Turbo Molecular Pump
Summary of Contents for UTM3400 Series
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Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
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Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
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Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
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