Ulvac UTM3400 Series, Instruction Manual

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WARNING
Do not operate the turbo molecular pump until safety is confirmed.
・
The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・
Fix the pump to host equipment according to Section 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・
Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
WARNING
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
WARNING
Do not remove or do maintenance the turbo molecular pump, before safety has been
confirmed.
・
Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by ULVAC. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular
pump with an inert gas and/or apparel are recommended when the turbo molecular pump has
been used in applications that required the use of corrosive, reactive, stimulative, or toxic
gasses.
・
Please take an adequate safety precaution based on the result of risk assessment of
explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.
・
Please execute the maintenance task of the turbo molecular pump after shutting power off by
following proper procedure and confirming that the rotor has stopped completely.
WARNING
If the equipment is used in a manner not specified by the manufacturer, the protection provided
by the equipment may be impaired.