Ulvac UTM3400 Series, Instruction Manual

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SECTION 1 OUTLINE AND DESCRIPTIONS
4
1
1.2.2 Power Cable
One of followings.
1.2.3 Standard Accessories
(Note 1) One of followings.
Description Notes
1 AC CABLE, 5 MT
2
AC CABLE, 10 MT
3
AC CABLE, 15 MT
4 AC CABLE, 20 MT
5 AC CONNECTOR SET
・
Connector
・
Clamp
・
Core
・
Assembling procedure
Description Qty Note
1
Gasket (inlet flange)
(Note 1)
1
VG300 : O-ring gasket
VG350 : O-ring gasket
ISO320F : Not included
2 Bolt set (inlet flange)
―
VG300 : Not included
VG350 : Not included
ISO320F : Not included
3 Dust cap (outlet flange) 1 KF40
4 Remote-control connector 1 D-sub 37 pin male
5 Serial-control connector 1 D-sub 9 pin female
6 Important safety instructions 1 English and Japanese
7 Instruction manual CD-ROM 1