PV8959-F4E005 33
6.3.Layer setting
Select [Setup] - [Layer] from the file menu. A LAYER setting window appears.
㻌
Menu
Description
Auto
When this item is enabled, film thickness is
automatically analyzed after measurement.
Unit
Sets the display unit of the film thickness analysis; you
can select the physical film thickness and the optical film
thickness obtained when the physical film thickness is
multiplied by a refractive index.
Use reflectance of
substrate
Sets the refractive index of a substrate; when using this
item, set it to Enable and then set the data filename
used as the refractive index of a substrate. A spectral
measured value data file (*.csv/*.dat) can be set as the
refractive index of a substrate. The first data of a data
file is used as the refractive index of a substrate. The
refractive index of a substrate is described below in
detail.
range
Sets the range of the wavelength to be analyzed for film
thickness; analysis can be done with high precision by
restricting the analysis range to the wavelength range in
which spectral measured values are high in reliability.
