PV8959-F4E005 11
Printing spectral measured value data
Select [Custom print] from the file menu. A print setting dialog box appears. Set each item
and press the OK button for printing.
3.3.Analysis of film thickness
After the measurement of the spectral measured values (reflection and transmission factors)
is completed, film thickness can be analyzed by setting a layer setting file and then
executing the analysis of film thickness. The film thickness is analyzed using the procedure
below.
Setting
the
layer
setting
file
Select [Setup] - [Layer] from the file menu and open a LAYER setting window. Set each item
according to the sample to be analyzed for film thickness. For details of the setting, see the
[6.3 Layer setting].
Analyzing the film thickness
Press the ANALYZE button and execute film thickness analysis.
Sets the range of the wavelength to
be analyzed for film thickness
Selects the analysis method of film
thickness; for the analysis method,
see the [6.3 Layer setting].
Sets the unit required when displaying
the result of film thickness analysis
Sets the thickness, extinctive index,
and refractive index of the selected
layer; set each item to all layers not
including an AIR layer. However,
setting is not required when [UNIT] is
[OPTICAL] and when [METHOD] is
[FFT]. For more details, see the [6.3
Layer setting].
Sets the layer count of the sample to
be analyzed for film thickness;
change the number of layers using
the ADD and DEL buttons.
