PV8344F4E013
36
Item
Description
AUTO
If enabled, analysis of film thickness is automatically done after the easurement.
UNIT
Unit of the film thickness displayed in the analysis.
USE REFLECTANCE
OF SUBSTANCE
Any spectroscopy data file (*.csv/*.dat) is available as reflectance of substance. The first
data in the data file will be used as the reflectance of substance. Details on reflectance of
substance will be provided later.
RANGE
Wavelength range to be analyzed in the analysis of film thickness. High accuracy can be
achieved by restricting the range to the wavelength range of high reliance of spectral
analysis.
METHOD
The method of analysis of film thickness. [PV] denotes peak-valley method, [FFT]
frequency analysis method, and [FIT] curve fit method. For detail on each method, refer to
6.3 Layer setting
in the
UPSM-SA Software Operation Manual
.
LAYER
Design parameter of the layer to be analyzed. There is no need to set up if METHOD is
[PV] and UNIT is [OPTICAL]. Otherwise, it must be properly configured. For details on the
setting, refer to
6.3.1 Layer setting
in the
UPSM-SA Software Operation Manual
.
(3)
Click the THICKNESS button to conduct an analysis of film thickness.
4.13. Calculation of color difference
Calculation of color difference is extracted from the values of spectroscopy.
For detail, refer to
5.3.1 Calculation of color difference
in the
USPM-SA Software
Operation Manual
.
(1) Open
the
COLOR
DIFFERENCE window.
Choose [Analyze]-[Color Difference] on the File menu. The COLOR DIFFERENCE
window opens.
(2)
Use the < > buttons to select a DATA NO for the calculation of color difference in
each pane of DATA1 and DATA2. Color difference is automatically calculated as the
numbers are defined.
File menu
