Diener femto, Operating Instructions Manual, Page: 94 / 156

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Connect vacuum pump with chamber. Place pump below the machine (on the floor) to avoid that
in case of malfunction pump oil flows back to the chamber.
Connect exhaust pipe. Exhausts have to be directed to fresh air or a professional exhaust
system.
•
Connect pump power supply line at plug ‘Pump’ at the back of the machine.
• Connect process gases (Pre - pressure at gas bottle approx. 0,5-2 bar)
Pumps must not be operated with Cl-, Br- and I- containing gases! Leybold standard pumps
(D16B, …) are working with mineral oil. At corrosive gas resistant pumps we advise to use
dry vacuum pumps. Alternative to dry vacuum pumps, there is the possibility to run the
pumps with PFPE – oil. This oil is very expensive and the dispose of this oil is also
problematic, therefore we discourage about it.
Which pump for which gases?
Pump Permitted Gases Short name
D
xy
B
Standard Pump
argon, helium, hexamethyldisiloxan, carbon
monoxide, carbon dioxide, air, oxygen,
nitrogen, nitrogen dioxide, nitrogen oxide,
hydrogene, Ar, He, HMDSO, CO,
CO
2
, O
2
, N, NO
2
, NO,
H
2
D
xy
BCS
Corrosive gas
equipment
ammonia, octafluoro cyclobutane, tetrafluoro
methan and all other non-corrosive gases NH
3
, C
4
F
8
, CF
4, and
Ar, He, HMDSO, CO,
CO
2
, O
2
, N, NO
2
, NO,
H
2
D
xy
BCS PFPE
Corrosive gas
equipment
sulfur hexa fluorine, nitrogen tri fluorine and all
other non-corrosive gases SF
6
, NF
3
,
and
Ar, He,
HMDSO, CO, CO
2
, O
2
,
N, NO
2
, NO, H
2
D
xy
BCS PFPE-
Al2O3
Corrosive
gas equipment
sulfur hexa fluorine, nitrogen tri fluorine and all
other non-corrosive gases SF
6
, NF
3
,
and
Ar, He,
HMDSO, CO, CO
2
, O
2
,
N, NO
2
, NO, H
2
Femto Pump Femto
Pump