Diener femto, Operating Instructions Manual, Page: 100 / 156

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1.10.5 Hot Plate
• The parts will be placed on the hot plate.
• The hot plate can be heated up to a max. temperature of 150°C
• For defined process conditions, higher etching rates
equipped with
Temperature Monitor
• A thermo sensor will be mounted in the vacuum chamber
•
Therewith it is possible to measure e.g. the surface temperature of the part
• Short Manual:
To switch between the monitorings press ‚Return’ button.
To set a heating up temperature change value in first display (sign on the left: arrow
up). To set a maximum temperature, press ‘Return’ button and set the temperature. In
this mode the LED ‘AL’ for alarm shines.
The temperature can be changed with the arrow buttons.
For more information see data sheet of manufacturer.
Remark: This short manual is only of importance if a heating element is installed!
Otherwise the instrument works just as a display not as controller.
or
Temperature Monitor Incorporated In PC Control
• A thermo sensor will be mounted in the vacuum chamber
• Therewith it is possible to measure f.e. the surface temperature of the part
• The temperature is shown on the screen.