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4.1. Pump
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Check oil level daily.
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Please follow manual of pump manufacturer.
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For oil change interval see manual. The oil change has to occur every 3 months.
4.2. Safety Components
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Check following components semi-annual (see circuit diagram):
6.2.1. door switch
6.2.2. vacuum switch
6.2.3. relay on PCB
6.2.4. timer
6.2.5. valves
4.3. Cleaning
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For the cleaning of the outside of the plasma system use only a light
wet cloth. For the cleaning of the chamber see chapter 1.4 Vacuum
Chamber. Never use solvents for the cleaning!
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Stainless steel recipients are easier to clean with chrome polisher. Therefore remove /
uninstall electrode previously.
4.4. Seals
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The door seal should be wiped off every day and semi-annual changed.
4.5. Electrode Retainer
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Please test / check electrode retainer for leaks:
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Pump off machine
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Start plasma process
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Wet electrode retainer with ethanol
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The plasma colour should not change from purple into light blue.
Summary of Contents for femto
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