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Pirani Measurement
2. Test of Pirani-Sensor:
To test the sensor, the resistor should be tested with an ohmmeter. Before the testing, the
plug for the pirani sensor has to be disconnected.
The resistance has to be between 2.2 and 2.6
Ω
.
P 1 – P 4: Potentiometer
P 4
P 3
GND
M 1
Plug for
Pirani Sensor
P 2
P 1
Relais
Voltmeter
Setpoint Voltage: 9.9 V
M 1 against GND
Summary of Contents for femto
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