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3.2.1. Pumping down
At this point the input of the Pumping down pressure and the maximum pumping down time
will be made. If this time will be exceeded an error message and an entry in the
Alarm list
appears.
3.2.2. Gas supply time
3.2.2.1 Gas supply time without vaporizer
Duration means that time, which will be waited between the first open of the mass-flow-
controllers and the switching on of the LF-generator. This time should be chosen as long as
the desired process pressure needs to stabilize.
At this point the input of the involved gas flows for the process will be made. As in the manual
mode, the input will be made in sccm, as long as the pressure controller is switched off. If the
pressure controller will be switched on, the share of the gas flows will be entered in %.
Notice: The sum of the shares of the gas flows will always be
100%
. The software controls
and adapt it automatically.
In addition a maximum deviation can be entered. If this value will be exceeded an error
message and an entry in the
Alarm list
appears. Also the process will be cancelled.
Now the input for the pressure controller will be done. There is the opportunity of switching
the pressure controller on or off. The pressure will be controlled by gases.
The last entry at this mask is the desired process pressure and its maximum valid deviation.
If the pressure controller is switched on, this value will be used as the set point for the
controller.
Summary of Contents for femto
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