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1.7.1 Control type A:
semi - automatic
•
The controlling of the process happens semi automatic
•
Pump, gas flow, plasma process and venting have to be started manual.
•
Selectable parameters: process time, power, kind of gas, gas flow
The single process steps are selected manual by user:
1. turn on pump
2. turn on process gas
3. set time
4. set power
5. start generator
6. flush
7. vent
main power switch
pump
gas
generator
c
c
a
a
r
r
r
r
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r
r
Set timer
a) Version with manual timer (at the back of the machine, see 1.3.1)
scale
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0,5 – 10 min
3 – 60 min
0,15 – 3 h
0,5- 10 h
3 – 30 h
0,15 – 3 min
3 – 60 sec
0,5 – 10 sec
0,15 – 3 sec
0,05 - 1 sec
door
electrode
power
HF-generator
timer
needle valve
Timer
venting
Summary of Contents for femto
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