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Motor safety device for rotary drive released!
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Rotary drive doesn't rotate!
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Matching signals an error!
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Chamber door switch open and vacuum switch on! Please check!
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Chamber door switch open and actual pressure less than 1 mbar! Please check!
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Actual pressure is less than 1 mbar and vacuum switch is NOT ON! Please check!
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Actual pressure is greater than 500 mbar and vacuum switch is ON! Please check!
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The operator stopped the process!
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The chamber door is not closed!
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The maximum evacuating duration was exceeded!
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The actual pressure is too low!
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The actual pressure is too high!
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The actual gas flow of gas 1 deviates notably from set value!
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The actual gas flow of gas 2 deviates notably from set value!
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The actual gas flow of gas 3 deviates notably from set value!
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The actual gas flow of gas 4 deviates notably from set value!
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The actual gas ratio of gas 1 deviates notably from set value!
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The actual gas ratio of gas 2 deviates notably from set value!
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The actual gas ratio of gas 3 deviates notably from set value!
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The actual gas ratio of gas 4 deviates notably from set value!
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The actual power of the LF-generator deviates notably from set value!
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The actual power of the RF-generator deviates notably from set value!
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The actual temperature of the recipient is too high!
Summary of Contents for femto
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