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5. Settings __________________________________________________________________ 58
5.1.1 Gas types ______________________________________________________________________________59
5.1.2 Mass-Flow-Controller _____________________________________________________________________59
5.1.3 Pressure Controller _______________________________________________________________________60
5.1.4 RF generator____________________________________________________________________________60
5.1.5 Rotary drive_____________________________________________________________________________60
5.1.6 Heating ________________________________________________________________________________60
5.1.7 Vaporizer with two valves __________________________________________________________________61
5.1.8 Controller ______________________________________________________________________________61
5.1.9 System ________________________________________________________________________________62
5.1.10 Password _____________________________________________________________________________64
5.1.11 Save _________________________________________________________________________________64
5.1.12 Load factory settings_____________________________________________________________________64
6. Diagram __________________________________________________________________ 65
6.1. Settings _______________________________________________________________________ 65
6.1 Channel dialogue __________________________________________________________________________66
6.2 Y-axis dialogue ___________________________________________________________________________68
6.3 Y-axes dialogue ___________________________________________________________________________68
6.3.1 Axes alignment: _________________________________________________________________________70
6.3.2 Axes __________________________________________________________________________________70
6.3.3 Minimum/Maximum value __________________________________________________________________70
6.3.4 Scaling ________________________________________________________________________________70
6.3.5 Format ________________________________________________________________________________70
6.3.6 Precision _______________________________________________________________________________71
6.3.7 Colour _________________________________________________________________________________71
6.3.8 Y-Axis _________________________________________________________________________________71
6.3.9 Grid ___________________________________________________________________________________71
6.3.10 Zero line ______________________________________________________________________________71
6.3.11 Context menu __________________________________________________________________________71
6.3.12 Function of the diagram __________________________________________________________________72
6.3.13 Functions of the diagram in the manual mode _________________________________________________75
7. Archive ___________________________________________________________________ 76
7. 1 Load... ________________________________________________________________________ 77
7.2. Print __________________________________________________________________________ 77
7.3 Export Process data _____________________________________________________________ 78
8. Maintenance ______________________________________________________________ 79
8.1. General _______________________________________________________________________ 80
8.2. Oil change _____________________________________________________________________ 80
8.3 Backup ________________________________________________________________________ 80
8.4 Leakage rate measuring __________________________________________________________ 82
8.5 Information _____________________________________________________________________ 82
9. Quitting the software _______________________________________________________ 82
Summary of Contents for femto
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