- 103 -
1
1
.
.
1
1
0
0
O
O
p
p
t
t
i
i
o
o
n
n
s
s
1.10.11 Oxygen Generator
•
Oxygen will be produced out of air.
•
Type: Kroeber O
2
•
Oxygen
power:
3
-
6
l/min
For more information see data sheet of manufacturer.
1.10.12 Pressure Measurement
•
Pirani Sensor
1.
The pirani sensor measures the pressure in the vacuum
chamber at a process pressure below 10 mbar.
The pirani sensor itself is made of a thin metal wire.
This wire has a resistor of approx. 2.5
Ω
at atmospheric
pressure.
The resistor rises with lower pressure, when the wire is
heating up by current flow (approx. 0.1 A).
Summary of Contents for femto
Page 23: ...23...