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Gas Ballast
•
At operating with oxygen the gas ballast valve has to be open. (see
manual vacuum pump).
Exhausts
•
Exhausts have to be piped into fresh air/ outside.
•
Outlet of exhaust pipe must not be closed, to not destroy pump.
Aggressive Liquids
•
Needle valves may be destroyed by agggressive liquids (formic acid).
Design unprohibited
gases
short
Standard
(brass
pipes, oil pump)
argon, helium, hexamethyldisiloxan, carbon
monoxide, carbon dioxide, air, oxygen,
nitrogen, nitrogen dioxide, nitrogen oxide,
hydrogen,
Ar, He, HMDSO,
CO, CO2, O2, N,
NO2, NO, H2
Corrosive Gas
Equipment
(stainless steel
pipes, dry pump)
ammonia, octafluorocyclobutane, sulphur
hexafluorine, nitrogen trifluorine,
tetrafluoromethane and all non-corrosive
gases
NH3, C4F8, SF6,
NF3, CF4
Following materials must never be connected with our machines:
Bromine, chlorine, iodine, bortrichlorine, tetrachloromethane and all other chlorine containing
and high corrosive materials.
The company Diener electronic GmbH & Co. KG will not grant liability for damages on the
machine which are caused by using those materials (corrosive gases on standard machines
and oil pumps)!
Please contact us before using aggressive gases and chemicals to clarify if your
machine is suitable for those processes.
Summary of Contents for femto
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