Diener femto, Operating Instructions Manual, Page: 149 / 156

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Subprogram2
last Subprogram clear hook / inaktive
Pumping Off Period
1. Pumping off pressure 0,2 mbar
2. max. Pumping off time 30 min.
Gas Supply Period
3. select gas Gas1: free Gas2: free
4. Gas supply period 30 sek.
5. select process gas no. none, because monomer
(HMDSO) is selected
6. Gas rate 0%
7. Max. deviation 0%
8. Gas flow min. 0 sccm
9. Gas flow 50 sccm
10. Gas flow max. 200 sccm (max. of MFC,
may vary)
11. Process pressure 0,3 mbar
12. Max. deviation process
pressure
- 0,20 mbar/ + 0,40 mbar
13. Control via gases clear hook / inaktive
Plasma Process
Period
14. Duration 10 min.
15. Power setpoint 80%
16. Max. absolute deviation power. 10%
17. observed generatores
check off (all)
18. Max. temperature 100°C
19. Monomer setpoint 10 mg/min
20. Max. deviation -1 mg/min / + 30 mg/min
22. Monitorings don't change
Flushing Period
22. flushing time 000:00:10
Venting Period 23. venting period 0 min.