Diener femto, Operating Instructions Manual, Page: 12 / 156

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SELECTION
VACUUM
CHAMBER
1.4.1
TYPE
A
1.4.2
TYPE
B
1.4.3
TYPE
C
1.4.4
TYPE
D
1.4.5
TYPE
E
1.4.6
TYPE
F
Chamber
configuration
round round round round round rectangular
Material:
vacuum chamber
stainless
steel
borosilicate
glass
borosilicate
glass
quartz glass quartz glass stainless steel
Chamber cover
cap cap hinged door cap hinged door hinged door
Covering material
aluminium,
glass pane aluminium,
glass pane aluminium,
glass pane aluminium,
glass pane aluminium,
glass pane aluminium,
glass pane
Inner diameter
Dia. 100 mm
D 278 mm
Dia. 95 mm
D 320 mm
Dia. 95 mm
D 320 mm
Dia. 95 mm
D 320 mm Dia. 95 mm
D 320 mm
W 103 mm
D 285 mm
H 103 mm
Opening diameter of
recipient
Dia. 100 mm Dia. 90 mm Dia. 90 mm Dia. 90 mm Dia. 90 mm
W 103 mm
H 103 mm
Chamber volume
approx.
2 litres
approx.
2 litres
approx.
2 litres
approx.
2 litres
approx.
2 litres
approx.
3 litres
Application areas
standard
plasma
processes,
small batch-
and
laboratory
equipment
for pure
plasma
processes,
small batch-
and laboratory
equipment
for pure
plasma
processes,
bulk
production and
manufacturing
for ultra pure
plasma
processes,
small batch-
and laboratory
equipment
for ultra pure
plasma
processes,
bulk
production and
manufacturing
standard
plasma
processes,
bulk
production
and
manufacturing
Figure
Cleaning of the chamber:
To clean the chamber a simple
oxygen gas process
is enough. The process duration should be
one hour with an empty chamber (the trays are loaded into the chamber, but no sample parts).
If the machine is heavier
contaminated
(dusty, thick Polymerization layers), we advise to clean the
chamber manual with
metal
(chrome)
polish
or a
standard trade oven cleaning spray.
For harder
contaminations you can use
steel wool
(only in metal chambers).
Never use acetone to clean the chamber!
If you want to clean your machine
after a coating process with HMDSO
(Hexamethyldisiloxane), a
plasma process with CF
4
(Tetra fluorine methane)
and O
2
(Oxygen) is the most effective process.
Use CF
4
only if your machine and pump are made for corrosive gases!
Check
regularly the
door seal
and the chamber seal of the machine. Dust on the seals may cause
leakage
, which may
disturb
/ irritates some sensitive
coating processes
. Remove those pollutions
before starting the process.
Also
check
regularly the
metal filters
at the back of the chamber. Are the filters dark discoloured, it
is possible that their pores
might be clogged
. In this case
clean
the filters
or replace
them. The
consequences of clogged metal filters are the reduction of the suction power and the pirani sensor
might be disturbed in his measurement results (the results might be weighted).
Clean
regularly the
chamber window
.
Remains of coatings
may
disturb other processes
and
you keep a better process control if you see the colour and spreading of the plasma.