Diener femto, Operating Instructions Manual, Page: 152 / 156

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Subprogram5
last Subprogram check off
Pumping Off Period
1. Pumping off pressure 0,2 mbar
Gas Supply Period
2. max. Pumping off time 30 min.
Plasma Process
Period 3. select gas Gas1: O2 Gas2: free
4. Gas supply period 30 sek.
Flushing Period
5. select process gas no. (= MFC resp. Gas
connection as installed
on machine. Gas 1 =
MFC 1 at machine,...)
6. Gas rate 100%
7. Max. deviation 10%
8. Gas flow min. 0 sccm
9. Gas flow 50 sccm
10. Gas flow max. 200 sccm (max. of MFC,
may vary)
11. Process pressure 0,3 mbar
12. Max. deviation process
pressure
- 0,20 mbar/ + 0,40 mbar
13. Control via gases check off
14. Duration 5 sek.
15. Power setpoint 80%
Venting Period
16. Max. absolute deviation power. 10%
17. observed generatores
check off (all)
18. Max. temperature 100°C
19. Monomer setpoint 0 mg/min
20. Max. deviation
-0 mg/min / + 100
mg/min
22. Monitorings don't change
22. flushing time 000:00:10
23. venting period 1 min.