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3.2. 3.4 Plasma process time with RF-Generator with matching and with heating
At this point the entry for the duration of plasma process in hours, minutes and seconds will
be made.
The operating mode for the RF-generator must be chosen.
The set power and its maximum absolute deviation will be entered. If this value will be
exceeded an error message and an entry in the
Alarm list
appears. Also the process will be
cancelled.
For the matching the set values for C-Load and C-Tune must be entered, also Manual
matching can be chosen.
If the button “Manual” is pressed, the set values will be used for the whole process.
If the button “Manual” is not pressed, the set values will be used as start values for the auto
matching.
The set temperature must be entered, also the minimum and the maximum temperature. The
process can only be started if the minimum temperature is reached.
The monitorings for actual pressure, actual gas flows, actual temperature and actual powers
start after a parameterizable time. If this time is passed the monitoring begins.
The error active time min means, the time which the respectively value has to be out of
ranges before an alarm will be generated.
Summary of Contents for femto
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