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8.4 Leakage rate measuring
To do a leakage rate measuring the button “Leakage rate measuring” has to be pressed. The
following mask appears:
The pumping down pressure, the duration of measuring and the chamber volume must be
input. Then the measuring can be started. During the measuring the actual duration is
displayed, after the measuring the leakage rate will be displayed.
8.5 Information
9. Quitting the software
To quit the software PRS the button “X”
(right upper edge) have to be clicked.
All programs and settings will be saved.
Summary of Contents for femto
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