- 91 -
1
1
.
.
9
9
V
V
a
a
c
c
u
u
u
u
m
m
p
p
u
u
m
m
p
p
Vacuum pumps are necessary to produce a vacuum in the plasma machine’s recipient.
SELECTION
VACUUM PUMPS
1.9.1
TYPE
A
1.9.2
TYPE
B
1.9.3
TYPE
C
1.9.4
TYPE
D
Description
S1.5 D2.5E
PK2DC SC5D
Description
rotary vane
pump
rotary vane
pump
rotary vane
pump
dry pump
Exhaust filter
9
9
9
-
Manufacturer
Leybold Leybold Ilmvac Leybold
Suction power
(m³/hour)
1.5 m³ / h
2.5 m³ / h
2 m³ / h
5 m³ / h
Oil type
mineral oil
mineral oil
mineral oil
-
Can work with oxygen,
argon and all
other usual
process gases
9
9
9
9
The pump can work
with corrosive
gases
-
-
9
*
-
Figure
* by using CF
4
/ O
2
or SF
6
the pump has a limited life time
Summary of Contents for femto
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