- 83 -
1
1
.
.
8
8
G
G
e
e
n
n
e
e
r
r
a
a
t
t
o
o
r
r
SELECTION
GENERATOR
1.8.1
TYPE
A
1.8.2
TYPE
B
1.8.3
TYPE
C
1.8.4
TYPE
D
1.8.5
TYPE
E
1.8.6
TYPE
F
Frequency
40 kHz
40 kHz
13.56 MHz
13.56 MHz
13.56 MHz
2.45 GHz
Power
0 - 100 W
0 – 1,000 W
0 - 50 W
0 - 100 W
0 – 100 W
0-300 W
Pulse function
- - -
9
9
-
Impedance matching
automatic automatic fixed manual
automatic
-
Display of forward power
-
9
-
9
9
9
Display of reflected
power
-
-
-
9
9
-
Safety switches: vacuum
safety switch and door
safety switch
9
9
9
9
9
9
Quartz stabilized
frequency (+/- 0,05 %)
-
-
9
9
9
-
PC Interface
-
9
-
9
9
9
Main applications
activation,
cleaning,
etching, semi-
conductor
(back-end)
plasma-
polymerization
activation,
cleaning,
etching, semi-
conductor
(back-end)
plasma-
polymerization
activation,
cleaning,
etching,
semi-
conductor
(front-end),
semi
conductor
(back-end),
plasma-
polymerization
activation,
cleaning,
etching,
semi-
conductor
(front-end),
Semi-
conductor
(back-end),
plasma-
polymerization
activation,
cleaning,
etching,
semi-
conductor
(front-end),
Semi-
conductor
(back-end),
plasma-
polymerization
activation,
cleaning,
etching,
semi-
conductor
(front-end),
Semi-
conductor
(back-end),
plasma-
polymerization
Summary of Contents for femto
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